Amorphous films of the Fe–Zr alloy prepared by ion beam assisted deposition

M Ding,F Zeng,F Pan
DOI: https://doi.org/10.1016/S0168-583X(00)00164-6
2000-01-01
Abstract:The possibility of the amorphous alloy forming in Fe/Zr multilayered thin films was studied by Ar+ ion beam assisted deposition (IBAD). The Ar+ ion energy used was from 4 to 12 keV. Several amorphous alloys were obtained in Zr-rich films. A crystal-amorphous-fcc phase-amorphous-crystal phase transformation was also observed in Fe19Zr81 films during IBAD experiment. The experimental results suggested a critical thickness of individual Fe layer over which Fe/Zr multilayered films could not be full amorphized by the IBAD method. The amorphous layer at interface was responsible for the formation of Fe-Zr alloy in the multilayers. (C) 2000 Elsevier Science B.V. All rights reserved.
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