Amorphous alloy film formed in an immiscible Cu–Ta system by ion beam assisted deposition

F Zeng,M Ding,B Zhao,F Pan
DOI: https://doi.org/10.1016/S0167-577X(01)00450-5
IF: 3
2002-01-01
Materials Letters
Abstract:Amorphous alloy films were obtained in the Cu–Ta system with positive heat of mixing by ion beam assisted deposition (IBAD) technique. It was found that among the various compositions studied, an amorphous film was only achieved in the alloys around the composition of Cu30Ta70. The amorphization mechanism under ion beam assisted deposition process was also discussed.
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