Ion beam induced formation of metastable alloy phases in Cu–Mo system during ion beam assisted deposition

bing zhao,d m li,f zeng,f pan
DOI: https://doi.org/10.1016/S0169-4332(02)01526-X
IF: 6.7
2003-01-01
Applied Surface Science
Abstract:The Cu–Mo alloy film with positive heat of mixing was prepared by ion beam assisted deposition (IBAD) technique. When the energy of Ar+ ions was 2keV during IBAD, metastable bcc Cu was formed in the Cu20Mo80 film. A Mo-based bcc supersaturated solid solution was obtained within the composition range of 0–50% Cu fraction. An fcc supersaturated solid solution was also formed around the composition of 15at.% Mo. The formation mechanisms of the metastable alloy phases were discussed in terms of the process far from equilibrium.
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