Solution-Processed Zinc Oxilde Thin Films and Top-Gate Thin Film Transistors

Xiao-Yan WANG,Gui-Fang DONG,Juan QIAO,Li-Duo WANG,Yong QIU
DOI: https://doi.org/10.3321/j.issn:1001-4861.2009.12.001
2009-01-01
Abstract:morphologies and crystallinity of the ZnO tMms were characterized by Atomic Force Microscopy(AFM)and X-ray Diffraction (XRD).Multilayer ZnO films were employed as active layers to prepare thin film transistors (TFTs),and patterned indium tin oxide(ITO) Wag used as source and drain electrodes.The device based on the threelayer ZnO films,prepared with the precursor concentration order of 0.25,0.10 and O.05 mol·L~(-1),showed higher mobility of 7.1×10~(-3)cm~2·V~(-1)·s~(-1)than the device wiith the precursor concentration order of 0.05,0.10 and 0.25mol·L~-(1)(5.2×10~(-3)cm~2·V~(-1)·s~(-1).The difference of the performance of TFTs based on these two kinds of films is attributed to the roushiness of the multilayer ZnO thin films.Smooth film is useful for forming excellent semiconductor/insulator interface,resulting in high mobility.
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