Investigation on High Vacuum Magnetron Sputtered IrMn Bottom Spin Valves

OUYANG Ke-qing,REN Tian-ling,LIU Hua-rui,QU Bing-jun,LIU Li-tian,LI Wei
DOI: https://doi.org/10.3969/j.issn.1007-4252.2005.02.004
2005-01-01
Abstract:The IrMn bottom spin valves,with structure of Ta/buffer layer/IrMn/CoFe/Cu/CoFe/NiFe/ Ta, were deposited on glass substrate by high vacuum DC magnetron sputtering method. The effect of NiFe and Cu buffer layer was investigated, and an optimized thickness (2nm) of buffer layer is pro- posed for the bottom pinned structure. The thermal annealing effect on the GMR properties in bottom pinned structure was discussed. The spin valves get high MR ratio ( 8.5% ), low coercivity ( 0.8Oe), and high exchange bias field (800Oe) after the optimizing the structure parameters and annealing conditions. Spin valve with bottom structure is compared with which with top structure.
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