A SOI Based Dopant-Free MOSFET for Logic and Memory Application

Weijun Cheng,Renrong Liang,Jun Xu
DOI: https://doi.org/10.1109/edssc.2019.8754255
2019-01-01
Abstract:In this paper, a SOI based dopant-free MOSFET was proposed. The device exhibits a current saturation vs gate voltage due to the existence of source/drain series resistance. The steady low saturation current indicates a low-power dissipation application. With a dual-gate control, the device's threshold voltage for the top gate can be effectively adjusted by the bottom back gate. A resistive load inverter was fabricated based on this dopant-free transistor and realized a characteristic voltage transfer curve with a low peak path current. By employing a thin silicon oxide film as tunneling layer and a thin HfZrO film as trapping layer, a non-volatile memory (NVM) was realized and a 1.21 V memory window was acquired after a 10 V/100 ms voltage pulse writing. Both the logic and memory functions have been realized at the same simple proposed structure.
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