Fabrication and characterisation of microscale hemispherical shell resonator with diamond electrodes on the Si substrate

Zhaoyang Liu,Weiping Zhang,Feng Cui,Jian Tang,Yuying Zhang
DOI: https://doi.org/10.1049/mnl.2018.5601
2019-01-01
Micro & Nano Letters
Abstract:A self-aligned fabrication method is employed for microscale hemispherical shell resonator with integrated diamond electrodes on a silicon (Si) substrate. The millimetre-scale three-dimensional (3D) hemispherical shell resonator, with integrated electrostatic excitation and capacitive detection transducers for full control of the resonator, is fabricated on the Si substrate by employing a microele...
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