A 3D-printed microhemispherical shell resonator with electrostatic tuning for a Coriolis vibratory gyroscope

Baoyin Hou,Ye Zhu,Chaofan He,Weidong Wang,Zhi Ding,Wen He,Yong He,Lufeng Che

DOI: https://doi.org/10.1038/s41378-024-00659-8

2024-03-07

Microsystems & Nanoengineering

Abstract:Abstract The emergence of microhemispherical resonant gyroscopes, which integrate the advantages of exceptional stability and long lifetime with miniaturization, has afforded new possibilities for the development of whole-angle gyroscopes. However, existing methods used for manufacturing microhemispherical resonant gyroscopes based on MEMS technology face the primary drawback of intricate and costly processing. Here, we report the design, fabrication, and characterization of the first 3D-printable microhemispherical shell resonator for a Coriolis vibrating gyroscope. We remarkably achieve fabrication in just two steps bypassing the dozen or so steps required in traditional micromachining. By utilizing the intricate shaping capability and ultrahigh precision offered by projection microstereolithography, we fabricate 3D high-aspect-ratio resonant structures and controllable capacitive air gaps, both of which are extremely difficult to obtain via MEMS technology. In addition, the resonance frequency of the fabricated resonators can be tuned by electrostatic forces, and the fabricated resonators exhibit a higher quality factor in air than do typical MEMS microhemispherical resonators. This work demonstrates the feasibility of rapidly batch-manufacturing microhemispherical shell resonators, paving the way for the development of microhemispherical resonator gyroscopes for portable inertial navigation. Moreover, this particular design concept could be further applied to increase uptake of resonator tools in the MEMS community.

nanoscience & nanotechnology,instruments & instrumentation

What problem does this paper attempt to address?

The paper aims to address the main issues in the manufacturing process of microhemispherical resonant gyroscopes (μHRG), specifically the cumbersome steps and high costs associated with traditional methods based on microelectromechanical systems (MEMS) technology. Specifically, the paper proposes a new method that utilizes projection microstereolithography (PμSL) technology and magnetron sputtering processes to achieve the integrated manufacturing of microhemispherical resonators and their electrodes. This significantly simplifies the manufacturing process, reducing the number of steps from the traditional dozen or so to only 2 steps. This method not only improves manufacturing efficiency but also enhances the performance of the final product, particularly in terms of the quality factor (Q-factor) in air, which is superior to that of traditional MEMS microhemispherical resonators. Additionally, this method makes it possible to mass-produce microhemispherical resonant gyroscopes for portable inertial navigation systems.