Abstract:Optical coupling between subwavelength grating pairs allows for the precise measurement of lateral or vertical displacement of grating elements and gives rise to different types of displacement and inertial sensors. In this paper, we demonstrate a design for a nano-optomechanical accelerometer based on a subwavelength grating pair that can be easily fabricated by a single Silicon-on-insulator (SOI) chip. The parameters of the subwavelength grating pair-based optical readout, including period, duty cycle, thickness of grating and metal film, and the distance of the air gap, were optimized by combining a genetic algorithm and rigorous coupled wavelength analysis (RCWA) to obtain the optimal sensitivity to the displacement of suspended grating element and the acceleration. A corresponding mechanical design was also completed to meet the highly sensitive acceleration measurement requirement while considering the mechanical cross-axis sensitivity, dynamic range, bandwidth, and fabrication feasibility. This device was verified by both RCWA and finite-different-time-domain methods, and a tolerance analysis was also completed to confirm that it is able to achieve the extremely high optical displacement sensitivity of 1.8%/nm, acceleration-displacement sensitivity of 1.56 nm/mg, and acceleration measurement sensitivity of more than 2.5%/mg, which is almost one order of magnitude higher than any reported counterparts. This work enables a single SOI-based high performance accelerometer, and provides a theoretical basis and fabrication guides for the design.

Large dimension wedge-resonator on silicon chip for gyro application

A Bulk Micromachined Gyroscope With Improved Quality-Factors At Atmospheric Pressure

Optical Design and Analysis of a High Resolution MOEMS Accelerometer Based on Diffraction Grating

Mechanical Design Optimization of A Single-Axis Moems Accelerometer Based on A Grating Interferometry Cavity for Ultrahigh Sensitivity

Single Chip-Based Nano-Optomechanical Accelerometer Based on Subwavelength Grating Pair and Rotated Serpentine Springs

A Silicon Wafer Dissolved Vibrating Gyroscope

0.015 Degree-Per-Hour Honeycomb Disk Resonator Gyroscope

High Finesse Silica Waveguide Ring Resonators for Resonant Micro-Optic Gyroscopes

All-solid integrated optical waveguide Gyro based on chip

Microsacle PolySilicon Hemispherical Shell Resonating Gyroscopes with Integrated Three-dimensional Curved Electrodes

Integrated bulk-micromachined gyroscope using deep trench isolation technology

Optimal Design of Ring Resonator in Silica Optical Waveguide

Single-Polarization Fiber-Pigtailed High-Finesse Silica Waveguide Ring Resonator for A Resonant Micro-Optic Gyroscope

A Bulk Micromachined Z-Axis Single Crystal Silicon Gyroscope for Commercial Applications

A MEMS Disk Gyroscope with High Fabrication Precision, High Quality Factor (>810k) and High Overload Characteristic (>15000g)

High-Q Microsphere Resonators for Angular Velocity Sensing in Gyroscopes

Broadband Source-Driven Resonant Micro-Optic Gyroscope Based on a Multi-Turn Waveguide-Type Ring Resonator

A 3D-printed microhemispherical shell resonator with electrostatic tuning for a Coriolis vibratory gyroscope

Optimization and Fabrication of an MOEMS Gyroscope Based on a WGM Resonator

A High-Performance Tactical-Grade Monolithic Horizontal Dual-Axis MEMS Gyroscope with Off-Plane Coupling Suppression Silicon Gratings

Silica Waveguide-Type Ring Resonators for Resonant Micro-Optic Gyroscopes