Abstract:This paper presents the architecture and optimization verification of a designed mode-mismatching gyroscope prototype made with fused silica in atmospheric pressure. The gyroscope prototype uses the decoupling frame and double-ended tuning fork (DETF) to achieve high sensitivity and quality factor. This structure can suppress residual quadrature error due to fabrication errors and imperfections. The angle rate-sensitive elements of the proposed gyroscope prototype with quasi-digital FM output are two DETF resonators resulting in differential implementation. We describe the principle of operation characterization of our micromechanical vibratory rate gyroscope based on resonant sensing of the Coriolis force and establish mathematical model called multi-parameters excitation system dynamics of Mathieu equation based on our previous work. We specify and quantify the impact functions of mechanical parameters on the properties of gyroscopes and identify sensitivity and limitation of sensitivity and bandwidth each other. A sample-based stochastic model is established to investigate the influence of different uncertain structure size on gyroscope performance. According to the uncertainty analysis, we modify the previous gyroscope structure, and then the parameters and structure of the improved third version gyroscope are obtained. This research can provide a reference for design and optimization of the structure size to improve robustness and performance of resonant angle rate sensor.

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