Fabrication of Metal-CNT-Metal Structures by Fluidic Alignment

谭苗苗,叶雄英,王晓浩,周兆英
DOI: https://doi.org/10.3969/j.issn.1672-6030.2008.06.001
2008-01-01
Abstract:Metal-CNT-metal structures are important in nano device fabrication based on carbon nanotubes.In this work,metal-CNT-metal structures were fabricated by assembling MWNTs with fluidic alignment and depositing and photolithopatterning metals on MWNTs.The alignment effects under different fluidic conditions were investigated.Better alignment of MWNTs was realized when larger obliquity of sample holder and higher speed of gas flow were applied.Comparing contact resistances between MWNTs and metals.it is found that gold(Au)is the better contact metal than titanium(Ti),metals on MWNTs have both lower contact resistances and smaller dispersivity than MWNTs deposited on Au electrodes.Finally,metal-CNT-metal structures with well contact were fabricated.
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