Suspended Multiwalled Carbon Nanotubes As Self-Aligned Evaporation Masks.

SB Lee,LAW Robinson,KBK Teo,M Chhowalla,GAJ Amaratunga,WI Milne,DG Hasko,H Ahmed
DOI: https://doi.org/10.1166/jnn.2003.204
2003-01-01
Journal of Nanoscience and Nanotechnology
Abstract:We describe the nanofabrication study of self-aligned electrodes on suspended multiwalled carbon nanotube structures. When metal is deposited on a suspended multiwalled carbon nanotube structure, the nanotube acts as an evaporation mask, resulting in the formation of discontinuous electrodes. The metal deposits on the nanotubes are removed with lift-off. Using Al sacrificial layers, it was possible to fabricate self-aligned contact electrodes and control electrodes nanometers from the suspended carbon nanotubes with a single lithography step. It was also shown that the fabrication technique may also be used to form nano-gapped contact electrodes. The technique should prove useful for the fabrication of nano-electromechanical systems.
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