Fabrication of Multiwalled Carbon Nanotube Bridges by Poly-Methylmethacrylate Suspended Dispersion

SB Lee,KBK Teo,GAJ Amaratunga,WI Milne,M Chhowalla,DG Hasko,H Ahmed
DOI: https://doi.org/10.1116/1.1570843
2003-01-01
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
Abstract:We report on the fabrication of multiwalled carbon nanotube (MWCNT) bridges using poly-methylmethacrylate (PMMA) suspended dispersion. This method makes it possible to suspend nanotubes between metal electrodes, without any chemical etching of the substrate, and to remove unwanted nanotubes from the substrate. Using a spacer layer of PMMA with a known thickness, it is also possible to control the suspended height of the MWCNT bridges. The electrical measurement results on suspended MWCNT bridges reveals that the room temperature resistance ranges from under a kΩ to a few MΩ, with the majority around 2–4 kΩ. It was shown that a plasma-enhanced chemical vapor deposition grown MWCNT with a diameter ∼55 nm can sustain current densities of ∼108 A/cm2, which will make them suitable for applications as integrated field emission cathodes.
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