Fabrication of Self-Aligned Side Gates to Carbon Nanotubes

LAW Robinson,SB Lee,KBK Teo,M Chhowalla,GAJ Amaratunga,WI Milne,DA Williams,DG Hasko,H Ahmed
DOI: https://doi.org/10.1088/0957-4484/14/2/336
IF: 3.5
2003-01-01
Nanotechnology
Abstract:We have fabricated self-aligned, side-gated suspended multi-walled carbon nanotubes (MWCNTs), with nanotube-to-gate spacing of less than 10 nm. Evaporated metal forms an island on a suspended MWCNT, the island and the nanotube act as a mask shielding the substrate, and lift-off then removes the metal island, leaving a set of self-aligned side gates. Al, Cr, Au, and Ti were investigated and the best results were obtained with Cr, at a yield of over 90%.
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