Aligned Single-Walled Carbon Nanotube Patterns with Nanoscale Width, Micron-Scale Length and Controllable Pitch

Sai Li,Ningyi Liu,Mary B. Chan-Park,Yehai Yan,Qing Zhang
DOI: https://doi.org/10.1088/0957-4484/18/45/455302
IF: 3.5
2007-01-01
Nanotechnology
Abstract:We have successfully aligned single-walled carbon nanotubes (SWNTs) in patterns with nanoscale width, micron-scale length and controllable pitch on SiO2/Si substrates using a poly(dimethysiloxane) (PDMS) microchannel mold. The microchanneled mold was patterned with a funnel-shaped channel to minimize nanotube jamming during capillary-driven inflow. Two (i.e.pre- and post-capillary) gas blows were employed to improve nanotube alignment. The fluidically pre-aligned carbon nanotubes were 'gas-spun' into a long 20 nm wide pattern, significantly narrower than the fluidic pre-alignment channel. These narrow and long aligned SWNT patterns were successfully transferred to a pair of gold electrodes spaced 15 mu m apart. The performance of the carbon nanotube field effect transistor (CNTFET) fabricated by this technique was evaluated.
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