Time Response Characteristic Investigation of the Capacitive Switches for Distributed MEMS Phase Shifters

HE Xunjun,WU Qun,JIN Boshi,YIN Jinghua
DOI: https://doi.org/10.3969/j.issn.1000-3819.2007.04.025
2007-01-01
Abstract:In this paper,a novel method for the analysis of switching time and dynamic be- havior of the electrostatic driven RF MEMS capacitive switches applied to microwave distributed MEMS phase shifters is presented.The effects of the materials,the driven voltage,the air gap height,and the width of the CPW signal line on the switching time are investigated using the SYNPLE module of IntelliSuite~(TM) simulation tool.By the optimization of parameters,the results demonstrated that for Au MEMS capacitive switches,V=40 V,g_0=2.5μm,and W=100μm, the switching time of switches is~7μs.
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