Fatigue Analysis of MEMS Cantilevered Switch
徐欣,郭方敏,葛羽屏,李成诗,于绍欣,朱荣锦,赖宗声,朱自强,王跃林,陆卫
DOI: https://doi.org/10.3969/j.issn.1004-1699.2004.03.034
2004-01-01
Abstract:A surface micro-electro-machined system miniature switch has been made on Si substrate using a suspended switch with gold / SiO x N y /gold micro-beam as the cantilevered arm, a chromium-to-gold electrical contact, and electrostatic actuation as the switching mechanism. The actuation voltage is measured to be 13 V, and electric isolation is obtained greater than 35 dB operating in a range from 1 to 40 GHz. The switch has been inserted into a time domain setup and their lifetimes have been characterized as a function of actuated voltage. Switch lifetimes were 105 switch actuation over. We simulate electrostatic and mechanical energy coupled and failure models of MEMS RF suspended beam contact switch by using ANSYS, demonstrating some relationship among lifetime and threshold voltage, frayed, rupture, fatigue failure and so on.