Fabrication of Coaxis-Gated ZnO Nanowire Field-Emitter Arrays With In-Plane Focusing Gate Electrode Structure
S. Deng,N. Xu,Jun Chen,J. She,Libin Wang,Guofu Zhang,Xiuqing Cao,Jing Yin
DOI: https://doi.org/10.1109/TED.2019.2957932
IF: 3.1
2020-02-01
IEEE Transactions on Electron Devices
Abstract:Addressable nanowire field-emitter arrays (FEAs) show potential for application in vacuum microelectronic devices, and a focusing structure is essential for modulation of the electron beam in FEAs. However, because of the complicated device structure induced by the focusing structure, nanowire integration in such a device is very difficult. To address this issue, a coaxis-gated ZnO nanowire FEA structure with an in-plane focusing gate electrode is proposed. The focusing gate electrode is located in the same plane as the cathode and control gate, and the addressing function is realized using a via structure. The coaxis-gated ZnO nanowire FEAs were fabricated using a four-mask microfabrication process, thus requiring one mask less than traditional focused FEAs. The characteristics of the fabricated ZnO nanowire FEAs were studied, and their addressing and focusing abilities were verified.
Engineering,Materials Science,Physics