Fabrication of ZnO Nanowire Field-Emitter Arrays with Focusing Capability

Yuanming Liu,Long Zhao,Zhipeng Zhang,Daokun Chen,Guofu Zhang,Juncong She,Shaozhi Deng,Ningsheng Xu,Jun Chen
DOI: https://doi.org/10.1109/ted.2018.2817290
IF: 3.1
2018-01-01
IEEE Transactions on Electron Devices
Abstract:ZnO nanowire field-emitter arrays (FEAs) show great application potentials in large-area vacuum microelectronics devices. However, the electron divergence is an issue which should be addressed. In this paper, ZnO nanowire FEAs with co-planar focus electrode were designed. A four-mask fabrication process and lift-off process were adopted to achieve the integration of focus electrode. The device demonstrated line-addressing and focusing capability with a spacing of 5 mm between anode and cathode, and the linewidth of field-emission images was reduced from 2.25 to 1.35 mm when the focus voltage changed from 50 to -50 V. Besides, line-shaped emission patterns were observed during focusing process, which was attributed to the emission pattern from the ZnO nanowire and the asymmetrical focusing electrical field.
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