Miniature Sensor Based on Fiber-graphene-integrated NEMS

Zeng-yong Liu,Fei Xu
DOI: https://doi.org/10.1109/icocn.2017.8121538
2017-01-01
Abstract:We demonstrate a new fiber-optic current sensor based on graphene nanoelectromechanical systems (NEMS) with a graphene membrane covering the hole on a fiber tip and two gold electrodes on opposite sides of the tip. The suspended graphene membrane will deform due to thermal effect when electrical current flows through it. Then the strain in the graphene nanomechanical resonator will change and it leads to the shift of resonant frequency. The proposed sensor is compact and shows a sensitivity as high as ~ 262.5 kHz/mA 2 . It can also be used for magnetic field sensors based on Lorentz force.
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