Abstract:Graphene is being increasingly used as an interesting transducer membrane in micro- and nanoelectromechanical systems (MEMS and NEMS, respectively) due to its atomical thickness, extremely high carrier mobility, high mechanical strength and piezoresistive electromechanical transductions. NEMS devices based on graphene feature increased sensitivity, reduced size, and new functionalities. In this review, we discuss the merits of graphene as a functional material for MEMS and NEMS, the related properties of graphene, the transduction mechanisms of graphene MEMS and NEMS, typical transfer methods for integrating graphene with MEMS substrates, methods for fabricating suspended graphene, and graphene patterning and electrical contact. Consequently, we provide an overview of devices based on suspended and nonsuspended graphene structures. Finally, we discuss the potential and challenges of applications of graphene in MEMS and NEMS. Owing to its unique features, graphene is a promising material for emerging MEMS, NEMS and sensor applications.

A Compact Fiber Magnetic Sensor based on Graphene NEMS

Miniature Sensor Based on Fiber-graphene-integrated NEMS

Fiber-optic Lorentz Force Magnetometer Based on a Gold-Graphene Composite Membrane

A Fiber-Optic magnetometer Based on Graphene NEMS Using Superparamagnetic Nanoparticles

Graphene Nanoelectromechanical System and Its Integration with Optical Fiber

Miniature Optical Fiber Current Sensor Based on A Graphene Membrane

A High-Sensitivity Resonant Magnetic Sensor Based on Graphene Nanomechanical Resonator

NEMS Accelerometer and Force Sensors Based on Suspended Graphene Membranes

Micro-Sensors with Giant magnetoelectric Coefficient

Optical Electrical Current Sensor Utilizing A Graphene-Microfiber-Integrated Coil Resonator

Compact Magnetic Field Sensor Based on Plasmonic Fiber-Tip.

A Highly Sensitive And Fast Response Molecular Sensor Based On Graphene Coated Microfiber

High-sensitivity graphene MEMS force and acceleration sensor based on graphene-induced non-radiative transition

Optical Fiber-Based Magnetically-Tuned Graphene Mechanical Resonator

A Resonant Graphene NEMS Vibrometer

Optoelectronic Biosensing In Graphene Driven Fiber Resonators With Single-Molecule Sensitivity And Selectivity

High-sensitivity MEMS force and acceleration sensor based on graphene-induced non-radiative transition

Optical Fiber Sensors based on Low-dimensional Materials

Nanoscale resonant sensors with 1D carbon nanostructures: A review of carbon nanotube based NEMS devices

Graphene-Fiber Biochemical Sensors: Principles, Implementations, and Advances

Graphene MEMS and NEMS