Xuge Fan,Chang He,Jie Ding,Qiang Gao,Hongliang Ma,Max C. Lemme,Wendong Zhang
Abstract:Graphene is being increasingly used as an interesting transducer membrane in micro- and nanoelectromechanical systems (MEMS and NEMS, respectively) due to its atomical thickness, extremely high carrier mobility, high mechanical strength and piezoresistive electromechanical transductions. NEMS devices based on graphene feature increased sensitivity, reduced size, and new functionalities. In this review, we discuss the merits of graphene as a functional material for MEMS and NEMS, the related properties of graphene, the transduction mechanisms of graphene MEMS and NEMS, typical transfer methods for integrating graphene with MEMS substrates, methods for fabricating suspended graphene, and graphene patterning and electrical contact. Consequently, we provide an overview of devices based on suspended and nonsuspended graphene structures. Finally, we discuss the potential and challenges of applications of graphene in MEMS and NEMS. Owing to its unique features, graphene is a promising material for emerging MEMS, NEMS and sensor applications.
Mesoscale and Nanoscale Physics,Materials Science,Other Condensed Matter,Applied Physics
What problem does this paper attempt to address?
The problem that this paper attempts to solve is to explore the application potential of graphene in micro - electro - mechanical systems (MEMS) and nano - electro - mechanical systems (NEMS) and the challenges it faces. Specifically, the article focuses on the following aspects:
1. **Advantages of Graphene as a Functional Material**: Due to its atomic - level thickness, extremely high carrier mobility, high mechanical strength, and piezoresistive electromechanical conversion characteristics, graphene has become a very promising transduction membrane material in MEMS and NEMS. NEMS devices based on graphene have higher sensitivity, smaller size, and new functions.
2. **Properties and Transduction Mechanisms of Graphene**: The paper discusses in detail the relevant properties of graphene, including its mechanical, electrical, and thermal characteristics, and introduces various transduction mechanisms of graphene in MEMS and NEMS, such as the piezoresistive effect, electrostatic sensing, resonant sensing, and Hall effect.
3. **Graphene Fabrication and Integration Technologies**: The article also explores various methods of integrating graphene with MEMS substrates, including transfer methods, preparation of suspended graphene, graphene patterning, and electrical contact techniques.
4. **Overview of Graphene - based MEMS and NEMS Devices**: The paper summarizes different types of MEMS and NEMS devices based on suspended and non - suspended graphene structures, such as pressure sensors, resonators, switches, mass sensors, accelerometers, microphones and speakers, gas sensors, Hall sensors, and flexible devices (transparent electrodes, strain sensors, pressure sensors, and audio transmitting and receiving devices).
5. **Application Potential and Challenges**: Finally, the paper discusses the potential and challenges of graphene in MEMS and NEMS applications, emphasizing that the unique properties of graphene make it a promising material for emerging MEMS, NEMS, and sensor applications.
Through the discussion of these aspects, the paper aims to provide a comprehensive review of the future applications of graphene in MEMS and NEMS and point out the problems existing in current research and the direction of future development.