Abstract:Unparalleled strength, chemical stability, ultimate surface-to-volume ratio and excellent electronic properties of graphene make it an ideal candidate as a material for membranes in micro- and nanoelectromechanical systems (MEMS and NEMS). However, the integration of graphene into MEMS or NEMS devices and suspended structures such as proof masses on graphene membranes raises several technological challenges, including collapse and rupture of the graphene. We have developed a robust route for realizing membranes made of double-layer CVD graphene and suspending large silicon proof masses on membranes with high yields. We have demonstrated the manufacture of square graphene membranes with side lengths from 7 micro meter to 110 micro meter and suspended proof masses consisting of solid silicon cubes that are from 5 micro meter multiply 5 micro meter multiply 16.4 micro meter to 100 micro meter multiply 100 micro meter multiply 16.4 micro meter in size. Our approach is compatible with wafer-scale MEMS and semiconductor manufacturing technologies, and the manufacturing yields of the graphene membranes with suspended proof masses were greater than 90%, with more than 70% of the graphene membranes having more than 90% graphene area without visible defects. The graphene membranes with suspended proof masses were extremely robust and were able to withstand indentation forces from an atomic force microscope (AFM) tip of up to ~7000 nN. The measured resonance frequencies of the realized structures ranged from tens to hundreds of kHz, with quality factors ranging from 63 to 148. The proposed approach for the reliable and large-scale manufacture of graphene membranes with suspended proof masses will enable the development and study of innovative NEMS devices with new functionalities and improved performances.

NEMS Accelerometer and Force Sensors Based on Suspended Graphene Membranes

Suspended graphene membranes with attached silicon proof masses as piezoresistive NEMS accelerometers

Graphene ribbons with suspended masses as transducers in ultra-small nanoelectromechanical accelerometers

A Resonant Graphene NEMS Vibrometer

High-sensitivity MEMS force and acceleration sensor based on graphene-induced non-radiative transition

Graphene MEMS and NEMS

High-sensitivity graphene MEMS force and acceleration sensor based on graphene-induced non-radiative transition

Modeling and Simulation of Graphene-Based Transducers in NEMS Accelerometers

A Flexible Tactile Sensor Based On Porous Graphene Sponge For Tiny Force Measurement

Manufacture and Characterization of Graphene Membranes with Suspended Silicon Proof Masses for MEMS and NEMS Applications

A Compact Fiber Magnetic Sensor based on Graphene NEMS

Miniature Sensor Based on Fiber-graphene-integrated NEMS

Highly Sensitive and Flexible Tactile Sensor Based on Porous Graphene Sponges for Distributed Tactile Sensing in Monitoring Human Motions

Four ribbons of double-layer graphene suspending masses for NEMS applications

High-Sensitivity Graphene MOEMS Resonant Pressure Sensor

Graphene piezoresistive flexible MEMS force sensor for bi-axial micromanipulation applications

Fiber-optic Lorentz Force Magnetometer Based on a Gold-Graphene Composite Membrane

Sensitive capacitive pressure sensors based on graphene membrane arrays

Potential Application of Graphene Nanomechanical Resonator As Pressure Sensor

Vibration Analysis of Nanomechanical Mass Sensor Based on Circular Graphene Sheets

Modeling and Simulation of 2D Transducers Based on Suspended Graphene-Based Heterostructures in Nanoelectromechanical Pressure Sensors