High-Sensitivity Graphene MOEMS Resonant Pressure Sensor

Yujian Liu,Cheng Li,Xiaodong Shi,Zhengwei Wu,Shangchun Fan,Zhen Wan,Song Han
DOI: https://doi.org/10.1021/acsami.3c04520
IF: 9.5
2023-06-13
ACS Applied Materials & Interfaces
Abstract:Nanomechanical resonators made from suspended graphene exhibit high sensitivity toward pressure variations. Nevertheless, these devices exhibit significant energy loss in nonvacuum environments due to air damping, as well as inevitably weak gas leakage within the reference cavity because of the slight permeation of graphene. We present a new type of graphene resonant pressure sensor utilizing micro-opto-electro-mechanical systems technology, which features a multilayer graphene membrane that is...
materials science, multidisciplinary,nanoscience & nanotechnology
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