Potential Application of Graphene Nanomechanical Resonator As Pressure Sensor

Shengwei Jiang,Xionghui Gong,Xing Guo,Xuefang Wang
DOI: https://doi.org/10.1016/j.ssc.2014.05.020
IF: 1.934
2014-01-01
Solid State Communications
Abstract:A pressure sensor consisting of graphene nanomechanical resonator and Si/SiO2 pressure membrane is demonstrated. The resonance frequency of resonator as function of external pressure smaller than 100kPa is simulated to be linear using the finite element method. The obtained pressure sensitivity for a single-layer graphene resonator can reach 26,838Hz/kPa, bigger than that of conventional resonant pressure sensors by two orders of magnitude. Moreover, the sensitivity can be further improved by increasing the ratio of side length to thickness of pressure membrane, and reducing the thickness and built-in strain of the resonator.
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