Impacts of Diameter and Ge Content Variation on the Performance of Si1-xGex P-Channel Gate-All-Around Nanowire Transistors

Xianle Zhang,Xiaoyan Liu,Longxiang Yin,Gang Du
DOI: https://doi.org/10.1109/tnano.2017.2774244
2017-01-01
Abstract:In this work, the impacts of both nanowire diameter (DNW) and Ge content (%) on the performance of Si1-xGex Gate-all- around nanowire p-channel FETs are investigated. The variations in SiGe Gate-all-around nanowire p-channel FETs induced by D-NW variation, Ge content variation, and some stochastic process variations including random dopants fluctuation, gate edge roughness, and metal gate granularity are also evaluated.
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