Abstract:Effects of atmosphere, temperatures and duration time on the surface topography and the electrical conductivity of LiNbO3 single crystals deposited with a 300-nm-thick layer of different metal films (Al, Mg and Zn) had been systematically investigated. LiNbO3 samples covered with Al film annealed at 500 degrees C for 6 h in different atmosphere were firstly studied. There were a lot of small holes generated after the residual film cleaning. In addition, the surface roughness was enhanced with increasing pressure. Compared with areas that without metal Al coated, a sharp step was formed, especially the deep step of about 125 nm in 3%H-2 + Ar atmosphere. The I-V curves reveal that the electrical conductivity of sample surface annealed at normal pressure was better than that in low vacuum. The current value was up to about 20 mA at 10 V in 3%H-2 + Ar, resulting in the conductivity significantly improved. Subsequently, samples deposited with different metal (Zn, Mg and Al, respectively) films annealed at 400 degrees C for 6 h in 3%H-2 + Ar were discussed. After wet etching, interestingly, a large number of nano sized protrusions were formed on the surface. Both of samples coated with Mg and Zn films presented no obvious step depth, while a clear step about 13 nm was formed for Al-coated samples. The I-V curves show that the surface conductivity of Zn-coated samples achieved the maximum of about 2.5 mA at 5 V among the three metals. Furthermore, Zn-coated samples annealed at different temperatures and holding time in 3%H-2 + Ar were also analyzed. After pickling, also, there were a lot of nanobulges appeared across the surface. With the temperatures keeping growth and the time extending, the nanobulges became much more compact and well-distributed. At the same time, the surface conductivity of samples would be gradually and effectively enhanced. The PL and XPS spectrums have indicated that more oxygen vacancies formed with increasing temperatures and holding time, resulting in the significant improvement in surface conductivity. The conduction mechanisms of sample surface can behave differently owing to the various annealing conditions.

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Effects of helium implantation fluence on the crystal-ion-slicing fabrication of Y-cut lithium niobate film

Fabrication of Y128-cut and Y36 crystal

The Electrical Properties of Single-Crystalline Z-cut LiNbO3 Thin Films Fabricated by Crystal-Ion-slicing Technique

Surface Micromorphology and Nanostructures Evolution in Hybrid Laser Processes of Slicing and Polishing Single Crystal 4H-Sic

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Highly C-Axis Oriented LiNbO3 Thin Film Grown on SiO2/Si Substrates by Pulsed Laser Deposition

Surface modification investigation of lithium niobate single crystal fiber

In-situ Poling of Lithium Niobate Films on Silicon Wafer by Applying a Low Electric Field During Pulsed Laser Deposition

Highly C-axis Oriented LiNbO; Thin Film on Amorphous SiO; Buffer Layer by PLD

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Highly C-axis oriented LiNbO3 thin film on amorphous SiO2 buffer layer and its growth mechanism

Effects of Atmosphere, Metal Films, Temperatures and Holding Time on the Surface Topography and Electrical Conductivity of LiNbO3 Single Crystals

A Parametric Study of ICP-RIE Etching on a Lithium Niobate Substrate

Growth of textured LiNbO3 thin film on Si (111) substrate by pulsed laser deposition

Nanostructure Formation and Regulation During Low-Energy Ion Beam Sputtering of Fused Silica Surfaces