Abstract:Glass ceramic (GC) is the most promising material for objective lenses for extreme ultraviolet lithography that must meet the subnanometer precision, which is characterized by low values of high spatial frequency surface roughness (HSFR). However, the HSFR of GC is typically degraded during ion beam figuring (IBF). Herein, a developed method for constructing molecular dynamics (MD) models of GC was presented, and the formation mechanisms of surface morphologies were investigated. The results indicated that the generation of the dot-like microstructure was the result of the difference in the erosion rate caused by the difference in the intrinsic properties between ceramic phases (CPs) and glass phases (GPs). Further, the difference in the microstructure of the IBF surface under different beam angles was mainly caused by the difference in the two types of sputtering. Quantum mechanical calculations showed that the presence of interstitial atoms would result in electron rearrangement and that the electron localization can lead to a reduction in CP stability. To obtain a homogeneous surface, the effects of beam parameters on the heterogeneous surface were systematically investigated based on the proposed MD model. Then, a novel ion beam modification (IBM) method was proposed and demonstrated by TEM and GIXRD. The range of ion beam smoothing parameters that could effectively converge the HSFR of the modified surface was determined through numerous experiments. Using the optimized beam parameters, an ultrathin homogeneous modified surface within 3 nm was obtained. The HSFR of GC smoothed by ion beam modification-assisted smoothing (IBMS) dropped from 0.348 to 0.090 nm, a 74% reduction. These research results offer a deeper understanding of the morphology formation mechanisms of the GC surfaces involved in ion beam processing and may point to a new approach for achieving ultrasmooth heterostructure surfaces down to the subnanometer scale.

Nanostructure Formation and Regulation During Low-Energy Ion Beam Sputtering of Fused Silica Surfaces

Nanopatterning of optical surfaces during low-energy ion beam sputtering

Optical and Mechanical Properties and Microstructures of Nb2O5, Ta2O5 and SiO2 Thin Films Prepared by Ion Beam Sputtering

Morphology evolution of fused silica surface during ion beam figuring of high-slope optical components

Evolution Mechanism of Surface Roughness During Ion Beam Sputtering of Fused Silica.

Nanostructures on Fused Silica Surfaces Produced by Ion Beam Sputtering with Al Co-Deposition

Influence of local densification on microscopic morphology evolution during ion-beam sputtering of fused-silica surfaces.

Structure Optimization and Fabricating Capability Analysis of an Ion-Beam Machine for a Subnanometer Optical Surface.

Detailed Subsurface Damage Measurement And Efficient Damage-Free Fabrication Of Fused Silica Optics Assisted By Ion Beam Sputtering

Microscopic morphology evolution during ion beam smoothing of Zerodur® surfaces.

Micron-scale Modifications Ofsisurface Morphology by Pulsed-Laser Texturing

Investigation of Roughness Evolution of Ion Sputtered Fused Silica Surface.

Investigation of Laser-Induced Damage Threshold Improvement Mechanism During Ion Beam Sputtering of Fused Silica

Molecular Dynamic Investigation of the Anisotropic Response of Aluminum Surface by Ions Beam Sputtering

Preparation of Subwavelength Nanostructures Based on Low-Energy Ion Bombardment

Focused Ion Beam Assisted Interface Detection for Fabricating Functional Plasmonic Nanostructures

Dual-control of incubation effect for efficiently fabricating surface structures in fused silica

Scan Speed and Fluence Effects in Femtosecond Laser Induced Micro/nano-Structures on the Surface of Fused Silica

Study of surface wettability on fused silica by ultrafast laser-induced micro/nano-surface structures

Controllable Formation of Si Nanostructures Based on Quasi-Plasmonic Planar Nanostructures Formed by Annular-Shaped Femtosecond Laser Pulse

Subnanoscale Ion Beam Modification-Assisted Smoothing of Heterostructure Surfaces