Abstract:Benefiting from high specific stiffness and high reflectance, aluminum optics with a complex surface profile are widely used in aerospace optical systems which have strict requirements for volume of the systems. Contact figuring polishing process provides highly deterministic technology for the fabrication of high precision aluminum optics. However, due to the high chemical activity of aluminum, the inevitable contamination layer will generate on the surface and bring difficulties for the subsequent processes, which greatly limit the fabrication precision. Ion beam figuring (IBF) is an effectively technology that can remove the contamination layer and improve surface quality. But, the surface profile may deteriorate during IBF. In this study, through experimental method, the nonuniformity of the contamination layer is found to be the inducer for deterioration and deviation of surface profile during IBF. The mapping between the characteristics of contamination layer and dwell time of contact polishing is studied. The thickness of the contamination layer will firstly increase with dwell time and stabilize to 120 nm when the dwell time exceeds a specific value. The variation of the IBF removal function with removal depth is also revealed through experimental and theoretical methods. Due to the dynamic variation of the composition in the contamination layer during IBF, the removal function increases with the removal depth and stabilizes when the depth exceeds 60 nm (the contamination layer is fully removed). Consequently, we propose two processing strategies to improve the aluminum optics fabrication process. Comparative experiments are performed on two off-axis aspherical surfaces. The results indicate that the surface profile can be stably maintained and improved during IBF processing based on the proposed strategies. Our research will significantly improve the fabrication precision of aluminum optics and promote the application of aluminum optics to the visible and even ultraviolet band.

Structure Optimization and Fabricating Capability Analysis of an Ion-Beam Machine for a Subnanometer Optical Surface.

Study on rapid convergence strategy of nano-precision optical surface by ion beam figuring

Morphology evolution of fused silica surface during ion beam figuring of high-slope optical components

Deterministic ion beam material adding technology for high-precision optical surfaces.

Process Optimization Based on Analysis of Dynamic and Static Performance Requirements of Ion Beam Figuring Machine Tools for Sub-Nanometer Figuring

Ion Beam Figuring of High-Slope Surfaces Based on Figure Error Compensation Algorithm

Ion beam figuring system for ultra-precise optics

Combined figuring technology for high-precision optical surfaces using a deterministic ion beam material adding and removal method

Rapid fabrication technique for nanometer-precision aspherical surfaces

Three-dimensional surface error reconstruction and ion beam figuring of optical hemisphere

Machining Position-Attitude Optimisation in Ion Beam Figuring of High-Precision Off-Axis Aspheric Surfaces

Study on the Relationship Between Motion Accuracy and Optical Surface Accuracy of Ion Beam Figuring Equipment

Corrective Capability Analysis and Machining Error Control in Ion Beam Figuring of High-Precision Optical Mirrors

Ion beam machining error control and correction for small scale optics.

Design of Ion Beam Figuring Machine for Optical Mirrors

Nanopatterning of optical surfaces during low-energy ion beam sputtering

The relationship between dynamic performance of ion beam figuring equipment and optical surface accuracy

Study on an Effective One-Dimensional Ion-Beam Figuring Method.

Influence of material removal programming on ion beam figuring of high-precision optical surfaces

High Precision Fabrication of Aluminum Optics by Optimizing an Ar+ Ion Beam Figuring Strategy for Polishing the Contamination Layer.

Ion Beam Figuring Strategy for Aluminum Optics with Minimal Extra Material Removal