Abstract:Ion beam figuring (IBF) is a novel technology for Ultra-precise optics. Material is removed from optic surface in atomic or molecular form by physical sputtering. Due to non-contact between the tool and the work piece, the problems involved in the conventional process are avoided, such as edge-effect and tool-wear. The ion beam figuring process is of high determinacy and high efficiency. All these properties make ion beam figuring one of the promising methods for producing mirrors of high precision with nm-rms accuracy. In this article, a new ion beam figuring system which contains doubled vacuum chambers is set up. Optics can be exchanged by a transport vehicle shuttling between the two vacuum chambers without opening the primary vacuum chamber and waiting for the ion source to cool completely, which means the efficiency can be increased greatly. A high performance processing robot contains three linear axes and two angular axes of motion, providing 5-axis ion source positioning capability with high accuracy. The angle can be up to 50 degrees to figure very steep spherical and aspherical surfaces. Then, the beam removal function of Gaussian shape is obtained by an experimental method and it is extremely stable for a long time. Finally, two sample mirrors are figured by the ion beam figuring system: one is a fused silica flat mirror with a 100 mm diameter (90% effective aperture) and an ultra-precise flat mirror with a surface error of 0.89 nm rms, 14.7 nm PV is obtained; the other fused silica concave spherical mirror with a 100 mm aperture (90% effective aperture) and 420 mm radius of curvature is figured and a concave spherical mirror with 1 nm rms, 16.9 nm PV is obtained, which prove that the ion beam figuring system is favourable for the figuring process.

The relationship between dynamic performance of ion beam figuring equipment and optical surface accuracy

Study on the Relationship Between Motion Accuracy and Optical Surface Accuracy of Ion Beam Figuring Equipment

Process Optimization Based on Analysis of Dynamic and Static Performance Requirements of Ion Beam Figuring Machine Tools for Sub-Nanometer Figuring

Structure Optimization and Fabricating Capability Analysis of an Ion-Beam Machine for a Subnanometer Optical Surface.

Study on rapid convergence strategy of nano-precision optical surface by ion beam figuring

Machining Position-Attitude Optimisation in Ion Beam Figuring of High-Precision Off-Axis Aspheric Surfaces

Study On Mechanism And Process Of Ion Beam Machining On High-Precision Large Optical Surfaces

Ion Beam Figuring of High-Slope Surfaces Based on Figure Error Compensation Algorithm

Adaptive Processing Strategy of Pulse Ion Beam for Sub-nanometer Precision Optical Components

Influence of material removal programming on ion beam figuring of high-precision optical surfaces

Corrective Capability Analysis and Machining Error Control in Ion Beam Figuring of High-Precision Optical Mirrors

Design of Ion Beam Figuring Machine for Optical Mirrors

Ion beam machining error control and correction for small scale optics.

Ion beam figuring system for ultra-precise optics

Three-dimensional surface error reconstruction and ion beam figuring of optical hemisphere

Research on Material Removal Accuracy Analysis and Correction of Removal Function During Ion Beam Figuring

Study on the roughness evolution of optical surfaces during ion beam sputtering

Nanometer precision fabrication for large scale optical surfaces

Deterministic ion beam material adding technology for high-precision optical surfaces.

Combined figuring technology for high-precision optical surfaces using a deterministic ion beam material adding and removal method

Morphology evolution of fused silica surface during ion beam figuring of high-slope optical components