Abstract:Fused silica optics, as key components in high - power laser systems, are prone to be damaged under short - pulse ultraviolet (UV) laser irradiation. CO 2 laser is usually used to repair the laser damage and extend the service life of optics. However, the anti - laser damage characteristics of repaired substrates sometimes can't meet the expectation. To facilitate better application of CO 2 laser repairing method, this work studied the CO 2 laser irradiating mechanism of fused silica in detail and investigated the damage characteristics of repaired optical surface through experiments. Firstly, finite element level - set (FELS) method is adopted to simulate CO 2 laser irradiating process. The simulation showed that CO 2 laser irradiation would cause molten material migration, vapor material deposition and affect the formation of residual stress. Various tests of morphology, residual stress, and photo - thermal absorption were conducted to study the changes of laser damage characteristics of repaired craters. The experimental results presented that molten materials migration and vapor materials re deposition occurred in CO 2 laser irradiation, which would promote the formation of residual stress, cause stronger laser absorption, or even induce laser damage. Through the experiment, accuracy of simulation was verified further. In this work, the CO 2 laser repairing mechanism of fused silica and laser damage characteristics of repaired optics are clarified through FELS simulation and experiments. Relative results can provide a certain technical support for the performance improvement of repaired fused silica optics.

Detailed Subsurface Damage Measurement And Efficient Damage-Free Fabrication Of Fused Silica Optics Assisted By Ion Beam Sputtering

Traceless Mitigation of Laser Damage Precursors on a Fused Silica Surface by Combining Reactive Ion Beam Etching with Dynamic Chemical Etching

Development of Integrated Multi-Station System to Precisely Detect and Mitigate Surface Damage on Fused Silica Optics

Study on the Absorption Characteristics and Laser Damage Properties of Fused Silica Optics under Flexible Polishing and Shallow DCE Process

A Study on the Surface Quality and Damage Properties of Single-Crystal Silicon Using Different Post-Treatment Processes

Anisotropic Ion Beam Etching Of Fused Silica To Mitigate Subsurface Damage

Research on Laser-Induced Damage Post-Restoration Morphology of Fused Silica and Optimization of Patterned CO2 Laser Repair Strategy

Combination of scanning ion beam etching and dynamic chemical etching for improving laser damage resistance of fused silica optics

Investigation on Hybrid Laser Ablation and Its Application in Fused Silica Damage Mitigation.

Layer by layer exposure of subsurface defects and laser-induced damage mechanism of fused silica

Experimental investigation and numerical simulation of defect elimination by CO2 laser raster scanning on fused silica

Quantitative Evaluation of Subsurface Damage by Improved Total Internal Reflection Microscopy

Advanced Mitigation Process (AMP) for Improving Laser Damage Threshold of Fused Silica Optics

Incident Laser Modulation of a Repaired Damage Site with a Rim in Fused Silica Rear Subsurface

Optical characterization and laser damage of fused silica optics after ion beam sputtering

Material migration and damage characteristics of fused silica optical surface treated by CO 2 laser/short – pulse ultraviolet laser

Evolution mechanism of subsurface damage during laser machining process of fused silica

A two-step physical-chemical etching technique to improve laser damage resistance of fused silica

Effect of ion beam etching on surface/subsurface structural defect evolution in fused silica optics

Mitigation Procedure for Damage on the Surface of Fused Silica Using a CO2 Laser Beam

Non-destructive evaluation of UV pulse laser-induced damage performance of fused silica optics