Abstract:Nanopore sensing is a key technology for single-molecule detection and analysis. Solid-state nanopores have emerged as a versatile platform, since their fabrication allows to engineer their properties by controlling size, shape, and chemical functionalization. However, lithography-based fabrication approaches for non-planar nanopores-on-chip rely on polymers that have limits with respect to hard- and robustness, durability, and refractive index. In this respect, nanopores made of metal oxides with high dielectric constant would be much more favourable and have the potential to extend the suitability of solid-state nanopores towards optoelectronic technologies. Here, we present a versatile method to fabricate three-dimensional nanopores of different dielectric oxides with controlled shapes. Our approach uses photoresist only as a template in the focused-ion-beam lithography to define the nanopore shape, which is subsequently coated with different oxides (SiO2, Al2O3, TiO2 and HfO2) by atomic-layer deposition. Then the photoresist is fully removed by chemo-physical treatment, resulting in nanopores entirely made from dielectric oxides on a thin solid-state membrane. Our methodology allows straightforward fabrication of convex, straight, and concave nanopore shapes that can be employed in various technologies and applications. We explored their performance as ionic nanochannels and investigated the dependence of the ionic current rectification on the nanopore geometry. We found hysteresis in the ionic conductance that enables potential applications of the nanopores in memristors. We also investigated the dielectric oxide nanopores for DNA sensing by measuring both cis-trans and trans-cis translocations and support our data with numerical simulations based on the Poisson-Nernst-Planck model.

Nanopore Fabricated in Pyramidal HfO2 Film by Dielectric Breakdown Method

Self-Aligned Nanopore Formed on a SiO2 Pyramidal Membrane by a Multipulse Dielectric Breakdown Method

Fabrication of Sub-Nanometer Pores on Graphene Membrane for Ion Selective Transport

Nanopore Fabrication by Controlled Dielectric Breakdown

Fabrication of Multi-Size Nanopores Auto-Positioning on Pyramidal Membrane Tip by Multi-Level Voltage Pulses.

Localised solid-state nanopore fabrication via controlled breakdown using on-chip electrodes

Tailored Fabrication of 3D Nanopores with Dielectric Oxides for Multiple Nanoscale Applications

Detection of Biomolecules Using Solid-State Nanopores Fabricated by Controlled Dielectric Breakdown

High fidelity moving Z-score based controlled breakdown fabrication of solid-state nanopore

Fast Fabrication Nanopores on a PMMA Membrane by a Local High Electric Field Controlled Breakdown

Kinetics of nanopore fabrication during controlled breakdown of dielectric membranes in solution

Controllable Fabrication of Pyramidal Silicon Nanopore Arrays and Nanoslits for Nanostencil Lithography

Fabrication of Nanopores in a Graphene Sheet with Heavy Ions: A Molecular Dynamics Study

Direct Fabrication of Sub-10 nm Nanopores in WO 3 Nanosheets Using Single Swift Heavy Ions

Fabrication of Hourglass-Shaped Solid-State Nanopores

Fabrication of Silicon Nanopore Arrays Using A Combination of Dry and Wet Etching

Localized nanopore fabrication in silicon nitride membranes by femtosecond laser exposure and subsequent controlled breakdown.

A novel method to fabricate silicon nanopore arrays

Controllable Fabrication and Rectification of Bipolar Nanofluid Diodes in Funnel-Shaped Si3 N4 Nanopores.

Rapid fabrication of solid-state nanopores with high reproducibility over a large area using a helium ion microscope.

Controlled size reduction and its underlying mechanism to form solid-state nanopores via electron beam induced carbon deposition