Detection of Biomolecules Using Solid-State Nanopores Fabricated by Controlled Dielectric Breakdown

Peng Cheng,Candong Zhao,Qinjie Pan,Zijian Xiong,Qi Chen,Xiangshui Miao,Yuhui He
DOI: https://doi.org/10.3390/s24082420
IF: 3.9
2024-04-10
Sensors
Abstract:Nanopore sensor technology is widely used in biomolecular detection due to its advantages of low cost and easy operation. In a variety of nanopore manufacturing methods, controlled dielectric breakdown has the advantages of a simple manufacturing process and low cost under the premise of ensuring detection performance. In this paper, we have made enhancements to the applied pulses in controlled dielectric breakdown and utilized the improved dielectric breakdown technique to fabricate silicon nitride nanopores with diameters of 5 to 15 nm. Our improved fabrication method offers the advantage of precise control over the nanopore diameter (±0.4 nm) and enhances the symmetry of the nanopore. After fabrication, we performed electrical characterization on the nanopores, and the IV characteristics exhibited high linearity. Subsequently, we conducted detection experiments for DNA and protein using the prepared nanopores to assess the detection performance of the nanopores fabricated using our method. In addition, we also give a physical model of molecule translocation through the nanopores to give a reasonable explanation of the data processing results.
engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
What problem does this paper attempt to address?
The problem that this paper attempts to solve is to prepare solid - state nanopores with precise diameter control (±0.4 nm) and good symmetry by an improved controlled dielectric breakdown method for biomolecule detection. Specifically, the researchers redesigned the pulses applied during the dielectric breakdown process to achieve precise control of the nanopore diameter, and used this method to prepare silicon nitride nanopores with diameters between 5 and 15 nm. Detection experiments of DNA and proteins were carried out through these nanopores to evaluate the detection performance of the nanopores, and a reasonable physical model of molecules passing through the nanopores was provided to explain the data processing results. ### Main problems 1. **Precise control of nanopore diameter**: Although traditional solid - state nanopore preparation methods such as focused ion beam (FIB) and focused electron beam (FEB) can produce nanopores with ultra - small diameters, they are costly and complex to operate. The controlled dielectric breakdown method provides a low - cost and simple method, but how to achieve precise control of the nanopore diameter is a challenge. 2. **Improving the symmetry of nanopores**: The shape symmetry of nanopores is crucial for detection performance. The researchers improved the symmetry of nanopores by an improved pulse technique, making them closer to cylindrical. 3. **Evaluating the detection performance of nanopores**: Detection experiments of DNA and proteins were carried out through the prepared nanopores to verify their detection performance and analyze the transport process of molecules passing through the nanopores. ### Solutions - **Improvement of pulse technique**: A multi - step current pulse breakdown method was adopted, with an initial amplitude of 30 nA and a step size of 5 nA. When the nanopore diameter suddenly increased by 0.5 nm, the current pulse was stopped, and a bipolar voltage pulse (initial amplitude 3 V, step size 0.02 V) was used instead to gradually enlarge the pore diameter. - **Nanopore characterization**: The conductive properties of nanopores were characterized by current - voltage (I - V) curves to estimate the diameter of nanopores. - **Biomolecule detection experiments**: Under different voltages and salt solution concentrations, the current blockage signals of DNA and proteins passing through nanopores were recorded, and their transport kinetics were analyzed. ### Results - **Nanopore characterization**: The diameters of the four prepared nanopores were 5.4 nm, 5.3 nm, 14.6 nm, and 15.0 nm respectively, and the I - V curves showed a good linear relationship, indicating high cleanliness of the nanopores. - **DNA detection**: The current blockage signals at different voltages showed that a higher voltage led to a larger current blockage amplitude and a higher capture rate. In addition, the experimental results at different salt solution concentrations showed that an increase in salt concentration increased the DNA capture rate and current blockage amplitude. - **Protein detection**: The transport characteristics of proteins were also evaluated by current blockage signals, verifying the performance of nanopores in protein detection. Through these improvements and experiments, the researchers have proved that the nanopores prepared by the controlled dielectric breakdown method have good performance in biomolecule detection.