Abstract:It has recently been shown that solid-state nanometer-scale pores ('nanopores') can be used as highly sensitive single-molecule sensors. For example, electrophoretic translocation of DNA, RNA and proteins through such nanopores has enabled both detection and structural analysis of these complex biomolecules. Control over the nanopore size is critical as the pore must be comparable in size to the analyte molecule in question. The most widely used fabrication methods are based on focused electron or ion beams and thus require (scanning) transmission electron microscopy and focused ion beam (FIB) instrumentation. Even though very small pores have been made using these approaches, several issues remain. These include the requirement of being restricted to rather thin, mechanically less stable membranes, particularly for pore diameters in the single-digit nanometer range, lack of control of the surface properties at and inside the nanopore, and finally, the fabrication cost. In the proof-of-concept study, we report on a novel and simple route for fabricating metal nanopores with apparent diameters below 20 nm using electrodeposition and real-time ionic current feedback in solution. This fabrication approach inserts considerable flexibility into the kinds of platforms that can be used and the nanopore membrane material. Starting from much larger pores, which are straightforward to make using FIB or other semiconductor fabrication methods, we electrodeposit Pt at the nanopore interface while monitoring its ionic conductance at the same time in a bi-potentiostatic setup. Due to the deposition of Pt, the nanopore decreases in size, resulting in a decrease of the pore conductance. Once a desired pore conductance has been reached, the electrodeposition process is stopped by switching the potential of the membrane electrode and the fabrication process is complete. Furthermore, we demonstrate that these pores can be used for single-biomolecule analysis, such as that of λ-DNA, which we use in a proof-of-concept study. Importantly, our approach is applicable to single nanopores as well as nanopore arrays, and can easily be extended to deposits of metal other than Pt.

Localized nanopore fabrication in silicon nitride membranes by femtosecond laser exposure and subsequent controlled breakdown.

Localised solid-state nanopore fabrication via controlled breakdown using on-chip electrodes

Photothermally Assisted Thinning of Silicon Nitride Membranes for Ultrathin Asymmetric Nanopores.

Fabrication of Multiple Nanopores in a SiNx Membrane Via Controlled Breakdown.

Nanopore Fabrication by Controlled Dielectric Breakdown

Muitilpe Nanopores Fabrication in a SiNX Membrane Via Controlled Breakdown

Fast Fabrication Nanopores on a PMMA Membrane by a Local High Electric Field Controlled Breakdown

Kinetics of nanopore fabrication during controlled breakdown of dielectric membranes in solution

Detection of Biomolecules Using Solid-State Nanopores Fabricated by Controlled Dielectric Breakdown

Monolithic Fabrication of NPN/SiNx Dual Membrane Cavity for Nanopore-based DNA Sensing

Fabrication of Nanopores Using Controlled Dielectric Breakdown

Fabrication of Solid State Nanopore in Thin Silicon Membrane Using Low Cost Multistep Chemical Etching

Tailored Fabrication of 3D Nanopores with Dielectric Oxides for Multiple Nanoscale Applications

Precise electrochemical fabrication of sub-20 nm solid-state nanopores for single-molecule biosensing

Multiple-Nanopores Fabrication Based on Dielectric Breakdown

A Method for Fabricating CMOS Back-End-of-Line-Compatible Solid-State Nanopore Devices

Instant Formation of Nanopores on Flexible Polymer Membranes Using Intense Pulsed Light and Nanoparticle Templates

Self-Aligned Nanopore Formed on a SiO2 Pyramidal Membrane by a Multipulse Dielectric Breakdown Method

On Stochastic Reduction in Laser-Assisted Dielectric Breakdown for Programmable Nanopore Fabrication.

Local solid-state modification of nanopore surface charges

High fidelity moving Z-score based controlled breakdown fabrication of solid-state nanopore