Abstract:It has recently been shown that solid-state nanometer-scale pores ('nanopores') can be used as highly sensitive single-molecule sensors. For example, electrophoretic translocation of DNA, RNA and proteins through such nanopores has enabled both detection and structural analysis of these complex biomolecules. Control over the nanopore size is critical as the pore must be comparable in size to the analyte molecule in question. The most widely used fabrication methods are based on focused electron or ion beams and thus require (scanning) transmission electron microscopy and focused ion beam (FIB) instrumentation. Even though very small pores have been made using these approaches, several issues remain. These include the requirement of being restricted to rather thin, mechanically less stable membranes, particularly for pore diameters in the single-digit nanometer range, lack of control of the surface properties at and inside the nanopore, and finally, the fabrication cost. In the proof-of-concept study, we report on a novel and simple route for fabricating metal nanopores with apparent diameters below 20 nm using electrodeposition and real-time ionic current feedback in solution. This fabrication approach inserts considerable flexibility into the kinds of platforms that can be used and the nanopore membrane material. Starting from much larger pores, which are straightforward to make using FIB or other semiconductor fabrication methods, we electrodeposit Pt at the nanopore interface while monitoring its ionic conductance at the same time in a bi-potentiostatic setup. Due to the deposition of Pt, the nanopore decreases in size, resulting in a decrease of the pore conductance. Once a desired pore conductance has been reached, the electrodeposition process is stopped by switching the potential of the membrane electrode and the fabrication process is complete. Furthermore, we demonstrate that these pores can be used for single-biomolecule analysis, such as that of λ-DNA, which we use in a proof-of-concept study. Importantly, our approach is applicable to single nanopores as well as nanopore arrays, and can easily be extended to deposits of metal other than Pt.

Tailored Fabrication of 3D Nanopores with Dielectric Oxides for Multiple Nanoscale Applications

Monolithic Integration of Vertical Thin-Film Transistors in Nanopores for Charge Sensing of Single Biomolecules

Probing Chemical Structures and Physical Processes with Nanopores

Precise electrochemical fabrication of sub-20 nm solid-state nanopores for single-molecule biosensing

Fabrication of Sub-20 Nm Nanopore Arrays in Membranes with Embedded Metal Electrodes at Wafer Scales

Multiple-Nanopores Fabrication Based on Dielectric Breakdown

Fabrication and Applications of Solid-State Nanopores

Fabrication of solid-state nanopores

Fabrication and practical applications of molybdenum disulfide nanopores

A Method for Fabricating CMOS Back-End-of-Line-Compatible Solid-State Nanopore Devices

Nanopore Design for Exceptional Rectification of DNA Translocation

Photothermally Assisted Thinning of Silicon Nitride Membranes for Ultrathin Asymmetric Nanopores.

Metal alloy solid-state nanopores for single nanoparticle detection

Nonlinear Ion Transport through Ultrathin Metal-Organic Framework Nanosheet

Muitilpe Nanopores Fabrication in a SiNX Membrane Via Controlled Breakdown

Monolithic Fabrication of NPN/SiNx Dual Membrane Cavity for Nanopore-based DNA Sensing

Integrating Sub-3 Nm Plasmonic Gaps into Solid-State Nanopores

Stable Nanopores in Two-Dimensional Materials for Ion Conductivity Devices and Biosensors

Fabrication of Solid State Nanopore in Thin Silicon Membrane Using Low Cost Multistep Chemical Etching

Nanopore Fabrication by Controlled Dielectric Breakdown

Fabrication of High-Aspect-Ratio Nanopores in Polymer Membranes: Analysis of Artifacts by Non-Destructive Testing