Abstract:The last decade, nanopores have emerged as a new and interesting tool for the study of biological macromolecules like proteins and DNA. While biological pores, especially alpha-hemolysin, have been promising for the detection of DNA, their poor chemical stability limits their use. For this reason, researchers are trying to mimic their behaviour using more stable, solid-state nanopores. The most successful tools to fabricate such nanopores use high energy electron or ions beams to drill or reshape holes in very thin membranes. While the resolution of these methods can be very good, they require tools that are not commonly available and tend to damage and charge the nanopore surface. In this work, we show nanopores that have been fabricated using standard micromachning techniques together with EBID, and present a simple model that is used to estimate the surface charge. The results show that EBID with a silicon oxide precursor can be used to tune the nanopore surface and that the surface charge is stable over a wide range of concentrations.

What problem does this paper attempt to address?

The main problem that this paper attempts to solve is to improve the stability and controllability of nanopores by locally and solid - state modifying the surface charges of nanopores. Specifically, the researchers aim to: 1. **Improve the chemical stability of nanopores**: Although biological nanopores (such as α - hemolysin) perform well in detecting DNA, etc., their poor chemical stability limits their applications outside the laboratory. Therefore, the researchers try to use more stable solid - state nanopores to simulate the behavior of biological nanopores. 2. **Improve the manufacturing methods of nanopores**: Although traditional high - energy electron beam or ion beam drilling methods can precisely control the size of nanopores, these methods will cause surface damage and charge implantation on nanopores, affecting their performance. For this reason, the researchers adopted a new method combining micro - machining technology and electron - beam - induced deposition (EBID) to manufacture nanopores. 3. **Regulate the surface charges of nanopores**: By introducing different precursor materials (such as silicon oxide), the researchers hope to achieve precise regulation of the surface charges of nanopores, so that they remain stable under different salt concentrations. ### Main research contents - **Manufacturing and modification of nanopores**: Using standard micro - machining technology combined with EBID, tetramethoxysilane (TMOS) precursor was introduced in a scanning electron microscope (SEM) to gradually reduce the size of nanopores and change their surface properties. - **Measurement of electrical characteristics**: By measuring the ion current under different salt concentrations, the change in the conductivity of nanopores was evaluated, and an analytical model was established using the Poisson - Nernst - Planck equation and Donnan equilibrium conditions to estimate the surface charges of nanopores. - **Stability of surface charges**: The study found that the surface charges of nanopores deposited by EBID remain stable under a wide range of salt concentrations, and the magnitude and sign of the surface charges can be regulated by adjusting the deposition time. ### Key formulas 1. **Nanopore conductivity formula**: \[ G=\frac{2\pi r_p}{L}\sum_i z_i^2 c_i D_i\frac{F^2}{RT} \] where: - \(G\) is the nanopore conductivity - \(r_p\) is the nanopore radius - \(L\) is the nanopore length - \(z_i\) is the ion valence - \(c_i\) is the ion concentration - \(D_i\) is the ion diffusion coefficient - \(F\) is the Faraday constant - \(R\) is the gas constant - \(T\) is the temperature 2. **Ion concentration formula**: \[ c_i = c_0\left(1 + 2z_i X+\sqrt{(2z_i X)^2 + 4}\right) \] where: - \(c_0\) is the bulk concentration - \(X\) is a parameter used to describe the fixed surface charge 3. **Surface charge parameter**: \[ X=\frac{\sigma}{2\pi Fr_p} \] where: - \(\sigma\) is the fixed surface charge density Through these studies, the paper shows the potential of EBID technology in nanopore manufacturing and surface charge regulation, providing new ideas and technical means for future nanopore applications.

Local solid-state modification of nanopore surface charges

Monolithic Integration of Vertical Thin-Film Transistors in Nanopores for Charge Sensing of Single Biomolecules

Probing Chemical Structures and Physical Processes with Nanopores

Precise electrochemical fabrication of sub-20 nm solid-state nanopores for single-molecule biosensing

Solid-state nanopore sensors

A Bioinspired Surface Chemistry for Solid- State Nanopores Modification

Shrinking solid-state nanopores using electron-beam-induced deposition

Solid-state Nanopores: Chemical Modifications, Interactions, and Functionalities

Fabrication and Applications of Solid-State Nanopores

Fabrication of solid-state nanopores

Mechanism and Kinetics of Lipid Bilayer Formation in Solid-State Nanopores.

Nanopore Design for Exceptional Rectification of DNA Translocation

Localised solid-state nanopore fabrication via controlled breakdown using on-chip electrodes

On Induced Surface Charge in Solid-State Nanopores.

Tailored Fabrication of 3D Nanopores with Dielectric Oxides for Multiple Nanoscale Applications

Detection of Biomolecules Using Solid-State Nanopores Fabricated by Controlled Dielectric Breakdown

Stability of Solid-State Nanopore Fabricated by Dielectric Breakdown

Solid-state nanopore systems: from materials to applications

Controllable Shrinking Fabrication of Solid-State Nanopores

Electrochemical protection of thin film electrodes in solid state nanopores

Localized nanopore fabrication in silicon nitride membranes by femtosecond laser exposure and subsequent controlled breakdown.