Abstract:Nanopore sensing is a key technology for single-molecule detection and analysis. Solid-state nanopores have emerged as a versatile platform, since their fabrication allows to engineer their properties by controlling size, shape, and chemical functionalization. However, lithography-based fabrication approaches for non-planar nanopores-on-chip rely on polymers that have limits with respect to hard- and robustness, durability, and refractive index. In this respect, nanopores made of metal oxides with high dielectric constant would be much more favourable and have the potential to extend the suitability of solid-state nanopores towards optoelectronic technologies. Here, we present a versatile method to fabricate three-dimensional nanopores of different dielectric oxides with controlled shapes. Our approach uses photoresist only as a template in the focused-ion-beam lithography to define the nanopore shape, which is subsequently coated with different oxides (SiO2, Al2O3, TiO2 and HfO2) by atomic-layer deposition. Then the photoresist is fully removed by chemo-physical treatment, resulting in nanopores entirely made from dielectric oxides on a thin solid-state membrane. Our methodology allows straightforward fabrication of convex, straight, and concave nanopore shapes that can be employed in various technologies and applications. We explored their performance as ionic nanochannels and investigated the dependence of the ionic current rectification on the nanopore geometry. We found hysteresis in the ionic conductance that enables potential applications of the nanopores in memristors. We also investigated the dielectric oxide nanopores for DNA sensing by measuring both cis-trans and trans-cis translocations and support our data with numerical simulations based on the Poisson-Nernst-Planck model.

Stability of Solid-State Nanopore Fabricated by Dielectric Breakdown

Development of Solid-State Nanopore Fabrication Technologies

Nanopore Fabrication by Controlled Dielectric Breakdown

Fabrication and Applications of Solid-State Nanopores

Multiple-Nanopores Fabrication Based on Dielectric Breakdown

Kinetics of nanopore fabrication during controlled breakdown of dielectric membranes in solution

Muitilpe Nanopores Fabrication in a SiNX Membrane Via Controlled Breakdown

Fabrication of Nanopores Using Controlled Dielectric Breakdown

Detection of Biomolecules Using Solid-State Nanopores Fabricated by Controlled Dielectric Breakdown

Fabrication of solid-state nanopores

Controllable Shrinking Fabrication of Solid-State Nanopores

Localised solid-state nanopore fabrication via controlled breakdown using on-chip electrodes

Fabrication of Hourglass-Shaped Solid-State Nanopores

High fidelity moving Z-score based controlled breakdown fabrication of solid-state nanopore

Fabrication of nanopores using electron beam

Stable Nanopores in Two-Dimensional Materials for Ion Conductivity Devices and Biosensors

On Stochastic Reduction in Laser-Assisted Dielectric Breakdown for Programmable Nanopore Fabrication.

Tailored Fabrication of 3D Nanopores with Dielectric Oxides for Multiple Nanoscale Applications

Local solid-state modification of nanopore surface charges

Fast Fabrication Nanopores on a PMMA Membrane by a Local High Electric Field Controlled Breakdown

Nanopore Fabricated in Pyramidal HfO2 Film by Dielectric Breakdown Method