Abstract:It has recently been shown that solid-state nanometer-scale pores ('nanopores') can be used as highly sensitive single-molecule sensors. For example, electrophoretic translocation of DNA, RNA and proteins through such nanopores has enabled both detection and structural analysis of these complex biomolecules. Control over the nanopore size is critical as the pore must be comparable in size to the analyte molecule in question. The most widely used fabrication methods are based on focused electron or ion beams and thus require (scanning) transmission electron microscopy and focused ion beam (FIB) instrumentation. Even though very small pores have been made using these approaches, several issues remain. These include the requirement of being restricted to rather thin, mechanically less stable membranes, particularly for pore diameters in the single-digit nanometer range, lack of control of the surface properties at and inside the nanopore, and finally, the fabrication cost. In the proof-of-concept study, we report on a novel and simple route for fabricating metal nanopores with apparent diameters below 20 nm using electrodeposition and real-time ionic current feedback in solution. This fabrication approach inserts considerable flexibility into the kinds of platforms that can be used and the nanopore membrane material. Starting from much larger pores, which are straightforward to make using FIB or other semiconductor fabrication methods, we electrodeposit Pt at the nanopore interface while monitoring its ionic conductance at the same time in a bi-potentiostatic setup. Due to the deposition of Pt, the nanopore decreases in size, resulting in a decrease of the pore conductance. Once a desired pore conductance has been reached, the electrodeposition process is stopped by switching the potential of the membrane electrode and the fabrication process is complete. Furthermore, we demonstrate that these pores can be used for single-biomolecule analysis, such as that of λ-DNA, which we use in a proof-of-concept study. Importantly, our approach is applicable to single nanopores as well as nanopore arrays, and can easily be extended to deposits of metal other than Pt.

Fabrication of Hourglass-Shaped Solid-State Nanopores

Simple and Cost-Effective Fabrication of Two-Dimensional Plastic Nanochannels from Silica Nanowire Templates

Fabrication and Applications of Solid-State Nanopores

Rapid fabrication of solid-state nanopores with high reproducibility over a large area using a helium ion microscope.

Fabrication of Silicon Nanopore Arrays Using A Combination of Dry and Wet Etching

Fabrication of solid-state nanopores

Fabrication of Solid State Nanopore in Thin Silicon Membrane Using Low Cost Multistep Chemical Etching

Controllable Shrinking Fabrication of Solid-State Nanopores

Massive Fabrication of Silicon Nanopore Arrays with Tunable Shapes

Fabrication of Silicon Nanopores with Tunable Shapes and Sizes

Development of Solid-State Nanopore Fabrication Technologies

Highly Efficient Shrinkage of Inverted-Pyramid Silicon Nanopores by Plasma-Enhanced Chemical Vapor Deposition Technology

A novel method to fabricate silicon nanopore arrays

Precise electrochemical fabrication of sub-20 nm solid-state nanopores for single-molecule biosensing

Low-cost and Convenient Fabrication of Polymer Micro/Nanopores with the Needle Punching Process and Their Applications in Nanofluidic Sensing

Tailored Fabrication of 3D Nanopores with Dielectric Oxides for Multiple Nanoscale Applications

Fabrication of nanopores and nanoslits with feature sizes down to 5 nm by wet etching method

Fabrication of Silicon Nanopore Arrays with Three-Step Wet Etching

Direct Fabrication of Sub-10 nm Nanopores in WO 3 Nanosheets Using Single Swift Heavy Ions

Fabrication of Sub-20 Nm Nanopore Arrays in Membranes with Embedded Metal Electrodes at Wafer Scales

Nanopore Fabrication by Controlled Dielectric Breakdown