Direct Fabrication of Sub-10 nm Nanopores in WO 3 Nanosheets Using Single Swift Heavy Ions

Lijun Xu,Ruslan A. Rymzhanov,Pengfei Zhai,Shengxia Zhang,Peipei Hu,Xuan Meng,Jian Zeng,Youmei Sun,Jie Liu
DOI: https://doi.org/10.1021/acs.nanolett.3c00884
IF: 10.8
2023-05-13
Nano Letters
Abstract:Extending the fabrication methodology of solid-state nanopores in a wide range of materials is significant in the fields of single molecule detection, nanofluidic devices, and nanofiltration membranes. Here, we demonstrate a new method to directly fabricate size- and density-controllable sub-10 nm nanopores in WO(3) nanosheets using single swift heavy ions (SHIs) without any chemical etching process. By selecting ions of different electronic energy losses (S(e)), nanopores with sizes from 1.8 to...
materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,nanoscience & nanotechnology
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