Abstract:We propose and fabricate solid-state nanopore devices that monolithically integrate solution-gated, vertical thin-film transistors (TFTs) inside the nanopores for charge-based sensing of translocating biomolecules. The TFTs consist of zinc oxide semiconductor channels and aluminum oxide gate dielectrics, which are both conformally deposited along the inner surfaces of the nanopores via atomic layer deposition. The resultant TFT channel lengths and nanopore diameters both reach the similar to 10 nm range. In translocation experiments using lambda-DNAs or bovine serum antibody (BSA) proteins, the TFT-nanopore devices demonstrate concurrent detection of the ion conductance blockade signals and modulation signals in the TFT electrical current. The TFT signals show opposite signs for the negatively charged DNAs and positively charged BSAs as well as staircase signal shapes that correspond to the folding and knotting of lambda-DNAs. Further experiments under various electrical biases and solution ionic strengths show that the ion blockade signals and the TFT signals have different dependence upon these experimental conditions. The TFT signals are analyzed to be consistent with the field effect sensing of the biomolecular charge, and the induced mirror charge is estimated from the signal amplitudes. This study could be a step forward to achieve charge-based single-biomolecular technology for basic research as well as for biosensing applications. It may also stimulate the development of TFT technologies for conformal integration of semiconductor electronics at the front end of nanostructures.

Detection of Single Molecular DNA Charge Through TFT-Integrated Nanopore Biosensor

Monolithic Integration of Vertical Thin-Film Transistors in Nanopores for Charge Sensing of Single Biomolecules

Numerical Study of Single Molecular Charge Sensing by FET-Integrated Nanopore Biosensor

Characterization of ITO-SiNx Nanopores for Single-Biomolecular Sensing.

Experimental Demonstration And Analysis Of Dna Passage In Nanopore-Based Nanofluidic Transistors

EFFICIENT CONTROL OF DNA TRANSPORT IN NANOPORE-BASED NANOFLUIDIC TRANSISTORS

Nanopores Incorporating ITO Electrodes for Electrical Gating of DNA at Different Folding States

Ultrashort single-walled carbon nanotubes in a lipid bilayer as a new nanopore sensor

Local Electrical Potential Detection of DNA by Nanowire–nanopore Sensors

Detecting a Single Molecule Using a Micropore-Nanopore Hybrid Chip

Ion detection in a DNA nanopore FET device

Dwell Time Characterization of DNA Translocation Through ITO-SiNx Nanopores

Detection of single oligonucleotide with an electrochemical confined solid-state nanopore

Specific Small-Molecule Detection Using Designed Nucleic Acid Nanostructure Carriers and Nanopores

DNA-functionalized silicon nitride nanopores for sequence-specific recognition of DNA biosensor

Mechanism Exploration of Enhanced Biosensing Performance for All-Carbon-Nanotube Thin-Film Transistors

A nanochannel array-based electrochemical device for quantitative label-free DNA analysis.

Detection of Biomolecules Using Solid-State Nanopores Fabricated by Controlled Dielectric Breakdown

Label-Free Electronic Detection of DNA Using Simple Double-Walled Carbon Nanotube Resistors

Single Nucleotide Discrimination with Electro-Optical Nanopore

Mass-Produced Nanogap Sensor Arrays for Ultrasensitive Detection of DNA