Abstract:SiC, as one typical 3rd generation semiconductor, has high potential to be used as the substrate for harsh environment sensors. However, the etching of this material is still challenging. Femtosecond laser has been demonstrated to have great potential in SiC etching, but the material removal mechanisms need further investigation. Herein, the two-temperature model considering carrier concentration is utilized to illustrate the microscopic mechanism of carrier concentration and temperature change in SiC caused by femtosecond laser irradiation. An 800 nm, 50 fs, 10 Hz Ti: sapphire femtosecond laser was used to process SiC in different media including air, HF and water. The ablation threshold of SiC in the three media is calculated. The highest ablation threshold (4.98 J/cm(2)) is obtained when the pulse number N = 50, in air. The lowest ablation threshold (0.53 J/cm(2)) is obtained when the pulse number N = 300, in HF. Results indicate that ablation threshold is strongly dependent on the laser pulse number and processing medium. Based on the cleavage phenomenon of SiC crystal structure observed by micro-nano characterization, the mechanism model of femtosecond laser-induced periodic structure of SiC surface based on material lattice cleavage is established, and the relationship between the intrinsic texture and the evolution of periodic structure of ablation surface is revealed. This will provide a new way to understand the ablation mechanism of femtosecond laser. In addition, the processing media has significant effect on surface roughness and chemical bond characteristics of SiC. Liquid processing media can reduce the surface roughness and avoid oxidation, which is helpful to manufacture SiC devices with specific surface requirements using femtosecond laser as an auxiliary method.

In-situ Testing of Surface Evolution of SiC During Thermal Ablation: Mechanisms of Formation, Flowing and Growth of Liquid Silica Beads

Revealing thermal ablation mechanisms of C/SiC with <i>in situ</i> optical observation and numerical simulation

Revealing thermal ablation mechanisms of C/SiC with in situ optical observation and numerical simulation

Evolution of surface droplets and flow patterns on C/SiC during thermal ablation

Formation Mechanisms of Characteristic Structures on the Surface of C/SiC Composites Subjected to Thermal Ablation

Ablation Behaviors and Mechanism of ZrC-SiC-Si/SiC-Si Double-Layered Coatings on C/C Composite under Plasma Flame at 3000 °C

Ablation evolution of a new light weight silicon based thermal protection material in high temperature gas flow

Surface morphology evolution and ablation mechanism of SiC–Si multiphase ceramic coating on graphite under oxy-acetylene flame

Bio‐Inspired Microstructure Design to Improve Thermal Ablation and Oxidation Resistance: Experiment on SiC

Ablation behavior of Cf/ZrC-SiC and Cf/SiC composites produced by precursor infiltration and pyrolysis combined with gaseous silicon infiltration

Ablation Behavior and Mechanism of Sicf/C-F/Sibcn Ceramic Composites with Improved Thermal Shock Resistance under Oxyacetylene Combustion Flow

Investigations on the ablation behavior of C/SiC under femtosecond laser

Spatio-temporal multi-scale observation of the evolution mechanism during millisecond laser ablation of SiC f /SiC

Spatio-temporal multi-scale observation of the evolution mechanism during millisecond laser ablation of SiCf/SiC

Microstructure and Ablation Mechanism of SiC-ZrC-Al2O3 Coating for SiC Coated C/C Composites under Oxyacetylene Torch Test

Crystal Cleavage, Periodic Nanostructure And Surface Modification Of Sic Ablated By Femtosecond Laser In Different Media

Study on the Ablation Behavior of C/SiC Composite Materials under the Action of Local Structural Thermal Sources

Removal mechanism of SiC/SiC composites by underwater femtosecond laser ablation

Laser ablation of SiC/SiC ceramic matrix composites: Morphological characterization, component evolution and oxidation mechanisms

Microstructure Evolution and Ablation Mechanism of C/C and C/C‐SiC Composites Under a Hypersonic Flowing Propane Torch

Ablation Mechanism of AlSiB-C/C Composites under an Oxy-Acetylene Torch