Deposition of BPx N1-x Thin Films and Study on the Influence of Phosphorus for Its Bandgap Modulation

徐世友,祁英昆,张溪文,韩高荣
DOI: https://doi.org/10.3969/j.issn.1673-2812.2003.03.005
2003-01-01
Materials Science and Engineering
Abstract:BP-xN 1-x thin films were deposited by hot filament assistant r.f.plasma enhanced chemical vapor technique(HF-PECVD) on quarts glass polished wafer substrates for apllication.The films were studied by X-ray diffraction(XRD),Scanning electron microscopy(SEM) and U-V spectrum.It is found that:(1)these thin films are polycrystals,their morphology changes with time and becomes ball-like at last.(2)optical bandgap of these films become narrow with time and the flux of PH-3 increased.Potential application of BP-xN 1-x thin films for ultraviolet spatial light modulator was suggested.
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