Phosphor induced optical band gap modulation of BPxN1-x films

Xiwen Zhang,Shiyou Xu,Gaorong Han
2004-01-01
Abstract:BPxN1-x thin films were grown on quartz glass substrates by hot filament assisted RF plasma enhanced chemical vapor deposition (HF-PECVD). The films were characterized with X-ray diffraction (XRD), energy dispersive X-ray spectroscopy (EDAX), scanning electron microscopy (SEM), and ultraviolet and visible light absorption spectroscopy. The results show that the phosphor content determines the optical band gap of the film. As the phosphorus hydrides (PH3) flow increases in the film growth its optical band gap narrows. Film morphology varies with the deposition time, ending up with small polycrystalline balls on the film surface.
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