Influence of Different Substrates on MgTiO_3-CaTiO_3 Thin Films Prepared by RF Sputtering

董树荣,王德苗,金浩,余厉阳
IF: 4
2004-01-01
Vacuum
Abstract:With the development of integration of microwave ceramic devices, dielectric ceramic thin films are studied widely. The preparation of MgTiO_3-CaTiO_3 thin films by RF sputtering onto different substrares is discussed. The results show that multi-crystal MCT, which regarded microwave dielectric properties as the bulk of ceramic, is obtained on (110) SiO_2. With raising temperature of substrate, the MCT changes form free MgO to micro-crystal, multi-crystal and bulky-crystal. The better deposition temperature is 610~650℃.
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