Studies of BaO-Nd2O3-TiO3 Thin Films by RF Sputter and Its TMLs

Wu Bi-yan,Dong Shu-rong
DOI: https://doi.org/10.1109/icimw.2006.368681
2006-01-01
Abstract:As a high permittivity and low loss ceramic, BaO-Nd2O3-TiO3 (BNT) is widely used in millimeter wave dielectric resonator. Perfect BNT thin films are obtained by through high density plasma RF sputter, and compared dielectric properties with bulk. The results show that underlay temperature has mainly effect on thin films. The optimize technology is gotten. Through simulation, thin film microstrip line based on BNT has more high integration and more excellent microwave dielectric loss properties than standard microstrip Line.
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