Abstract:With remarkable reduction of the characteristic scales in researches of materials and structures, microforce sensing and loading is becoming an important and challenging issue in mechanical tests. On the one hand, miniaturization of the tested objects leads to serious problems of manipulating, grasping, and loading. On the other hand, the smaller a sample is, the smaller the forces have to be measured. Up to now, it is still a difficult task to measure such small forces. In this paper, a newly developed probe-type microforce sensor is described, which can be combined with a micromanipulator to perform microforce sensing and loading. A strategy call ladder or hierarchy force sensing and loading method is further suggested, by which the above combined system is used as a platform to calibrate other cantilever probes with finer resolutions, which may form a sequence of probe-type sequence microforce sensors to cover a broad range of forces to be measured from mN down to nN and even lower provided that proper spring constants are selected for these force sensors. In the preliminary studies, two probe-type microforce sensors are successfully developed with force sensing sensitivities of 705.4nN/mV and 37.3nN/mV, respectively. They are applied to calibrate atomic force microscope (AFM) cantilevers with various spring constants, and then one of these calibrated cantilevers is used as a more sensitive force sensor to calibrate other even softer cantilevers. Tests of real microscale objects, a single silk filament and a papilla on the lotus leaf surface, demonstrate excellent performance of the developed sensors.

A Method for Deformation and Force Measurement of Micro-Cantilever Based on Local Feature Point Detecting and Matching

Measurement of Deformation and Force for Microcantilevers Based on Feature Point Matching and Digital Image Correlation

Vision-Based Force Measurement Using Geometric Moment Invariants

Method for measuring micro-cantilever force constant

Measurement of Deformation and Strain Field of Cantilever Beam under Forced Vibration.

Optimal Design of A Cantilever-Based Sensor for Measuring Micro-Forces

Experiments on the Deformation of MEMS Mciro-Cantilever Using AFM

Deformation Measurement of A Small Component and A Thin Film Using Time Sequence Speckle Pattern Interferometry

Visual Force Measurement Using Pseudo Zernike Moment Invariants

Deformation measurement based on high resolution distributed optical fiber sensing and conjugated beam method

A novel technique of microforce sensing and loading

An New Instrument for Measuring Mechanical Compliance of Micro-Systems

Improved Calibration Method For Lateral Force Of The Cantilever Deflection Force Sensor In Atomic Force Microscope

Performance analysis of Micro-cantilever beams and sensor data fitting

Optical Full-Field Technique for Measuring Deformation on Micromechanical Components

Vision-Based Force Measurement Using Pseudo-Zernike Moment Invariants

Simultaneously Measuring Force and Displacement: Calibration of Magnetic Torque Actuated Microcantilevers for Nanomechanical Mapping

The Research of Speckle Technique in Deformation Measurement Fields

Investigation of Loading and Force Sensing Properties of a Probe-Type Microforce Sensor with Force-Distance Curves

The Micro Force Sensor for Micro Friction Testing

Direct strain measurement method based on the correlation of defocused laser speckle pattern