Investigation of Capillary Adhesion Between the Microcantilever and the Substrate with Electronic Speckle Pattern Interferometry

Xide Li,Yun Peng
DOI: https://doi.org/10.1063/1.2403187
IF: 4
2006-01-01
Applied Physics Letters
Abstract:In this letter, the authors present an experimental study of the capillary adhesion of microcantilevers and substrate using electronic speckle pattern interferometry. The transient deformation of a microcantilever caused by the capillary force was measured and the energy function of the adhesion system was constructed based on the independent parameters of adhesion length and volume fraction of the adhesion medium. Therefore, the capillary force could be theoretically determined by the minimum energy function, and the deformation of the microcantilever at the equilibrium state could be calculated and compared with the experimental result.
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