Abstract:¶ Corresponding authors Advances in the field of micro/nano-electro-mechanical systems (MEMS and NEMS) now offer unique opportunities in the design of small and ultrasensitive analytical methods. MEMs/NEMs have demonstrated their unique advantages when they are combined with chemistry and biology, including fast, real-time responses. In addition, MEMs and NEMS are small enough to be integrated into other devices. One of the most promising MEMs is microcantilevers, which have been proven to be an outstanding transducer for chemical and biological sensors. This review summarizes the receptors and immobilization approaches reported for nanomechanical sensors and interpret the mechanism and dynamic relationship of recognition induced nanomechanical motions. Since the three pioneer papers (1-3) published in 1994, the micro/nanocantilever sensor technology had boomed and become a promising sensor technology. Microcantilever sensors have several advantages over many other sensor technologies, including faster response time, lower cost of fabrication, the possibility of sensor arrays with small overall dimensions, the ability to explore microenvironments, and improved portability for field applications. SEM pictures of microcantilevers are shown in Fig. (1). Microcantilevers are miniature diving boards that are micromachined from silicon or other materials. The length of these cantilevers is often in the range of 100-200 microns while the thickness ranges from 200 -1000 nm; Recent advances in micromachining cantilever beams that can detect extremely small forces and mechanical stresses promise to bring about a revolution in the field of chemical, physical, and biological sensor development.

Monitoring Of Molecule Adsorption And Stress Evolutions By In-Situ Microcantilever Systems

In situ detection of calcium ions with chemically modified microcantilevers

Chemical Specificity in Nanomechanical Sensors

Cysteine Monolayer Modified Microcantilevers for Impulse Monitoring

Review—Reaction-Based Microcantilever Sensors

Approaches To Increasing Surface Stress For Improving Signal-To-Noise Ratio Of Microcantilever Sensors

Mechanical and Electronic Approaches to Improve the Sensitivity of Microcantilever Sensors.

Detection of Ph Variation Using Modified Microcantilever Sensors

Surface Stress Induced by Interactions of Adsorbates and Its Effect on Deformation and Frequency of Microcantilever Sensors

Microcantilever (MCL) Biosensing

Mechanics of Surface Enhanced Microcantilever Sensors

Cantilever-based Transducer for Molecules Configuration Research

Tuning and Monitoring of Quantum Dot Growth by an in Situ Cantilever

Investigation of Adsorption and Absorption-Induced Stresses Using Microcantilever Sensors

Chemical and Biological Sensors Based on Microcantilever Structure

Theoretical Analysis of Adsorption-Induced Microcantilever Bending

Molecular Mechanics Modelling and Simulation of the Adsorption-Induced Surface Stress in Micro-Nano-Cantilever Sensors

Microcantilever Biosensors: Probing Biomolecular Interactions at the Nanoscale

Investigation on Conformation Transition of Macromolecules Using Microcantilever Sensing

Theoretical Analysis of Chemisorption-Induced Surface Stress

Chemisorption-Induced Microcantilever Deflection: A Theoretical Model