Abstract:¶ Corresponding authors Advances in the field of micro/nano-electro-mechanical systems (MEMS and NEMS) now offer unique opportunities in the design of small and ultrasensitive analytical methods. MEMs/NEMs have demonstrated their unique advantages when they are combined with chemistry and biology, including fast, real-time responses. In addition, MEMs and NEMS are small enough to be integrated into other devices. One of the most promising MEMs is microcantilevers, which have been proven to be an outstanding transducer for chemical and biological sensors. This review summarizes the receptors and immobilization approaches reported for nanomechanical sensors and interpret the mechanism and dynamic relationship of recognition induced nanomechanical motions. Since the three pioneer papers (1-3) published in 1994, the micro/nanocantilever sensor technology had boomed and become a promising sensor technology. Microcantilever sensors have several advantages over many other sensor technologies, including faster response time, lower cost of fabrication, the possibility of sensor arrays with small overall dimensions, the ability to explore microenvironments, and improved portability for field applications. SEM pictures of microcantilevers are shown in Fig. (1). Microcantilevers are miniature diving boards that are micromachined from silicon or other materials. The length of these cantilevers is often in the range of 100-200 microns while the thickness ranges from 200 -1000 nm; Recent advances in micromachining cantilever beams that can detect extremely small forces and mechanical stresses promise to bring about a revolution in the field of chemical, physical, and biological sensor development.

Cysteine Monolayer Modified Microcantilevers for Impulse Monitoring

Ultrasensitive Detection of Cu2+ Using a Microcantilever Sensor Modified with L-Cysteine Self-Assembled Monolayer.

In situ detection of calcium ions with chemically modified microcantilevers

Mechanical and Electronic Approaches to Improve the Sensitivity of Microcantilever Sensors.

Simulation and Design of Piezoelectric Microcantilever Chemical Sensors

Microcantilever (MCL) Biosensing

Ultrasensitive Detection of Cro42- Using A Microcantilever Sensor

Microcantilever Biosensors Based on Conformational Change of Proteins.

Fabrication and characterization of SiO2 microcantilever for microsensor application

Ultrasensitive detection of CrO4(2-) using a microcantilever sensor.

A Novel Self-Assembled Monolayer (SAM) Coated Microcantilever for Low Level Caesium Detection

Chemical Specificity in Nanomechanical Sensors

Detection of CrO<sub>4</sub><sup>2</sup><sup>-</sup>Using a Hydrogel Swelling Microcantilever Sensor

Micromechanical Sensors Based on Conformational Change of Proteins

Micromachined SiO 2 microcantilever for high sensitive moisture sensor

Highly Selective Microcantilever Sensor For Cesium Ion Detection

Fabrication and Characterization of Sio2 Microcantilever for High Sensitive Moisture Sensor

A Ph Sensor Based on a Microcantilever Coated with Intelligent Hydrogel

Microcantilever Biosensors for Chemicals and Bioorganisms

Detection of Ph Variation Using Modified Microcantilever Sensors

Detection of CrO4(2-) Using a Hydrogel Swelling Microcantilever Sensor.