Abstract:Two types of aluminum oxide (Al2O3) modified microcantilevers (MCLs) were tested for their sensitivity and reproducibility for detection of low levels of moisture. Aluminum was sputtered on the MCLs and oxidized to Al2O3 through thermal oxidation (Method I) and anodization method (Method II). Both deflection and frequency change of the MCLs were investigated. Thermally treated MCLs showed a 16±2nm deflection and a 25Hz change in resonant frequency, i.e., a mass change of 1.85×10−11g, to a 200ppm level of moisture. MCLs from Method II showed a 95±5nm deflection and a 340Hz change in resonant frequency, i.e., a mass change of 41.76×10−11g, to the 200ppm level of moisture. The MCLs’ response time to moisture was less than 3min using the deflection mode, and less than 25s using the frequency method. The MCLs prepared by Method II demonstrated a higher sensitivity toward moisture measurement due to the larger surface area of the porous Al2O3 coating. The comparison also suggests that the frequency responses of microcantilever sensors to moistures are much faster than the deflection responses. These sensors were stable for months stored under ambient conditions. The bending amplitudes and frequency change were proportional to the moisture level, and the detection of moisture was not affected by alcohols in the environment.

Ultrasensitive detection of CrO4(2-) using a microcantilever sensor.

Ultrasensitive Detection of Cro42- Using A Microcantilever Sensor

Detection of CrO4(2-) Using a Hydrogel Swelling Microcantilever Sensor.

Detection of Cro42- Using A Hydrogel Swelling Microcantilever Sensor

Ultrasensitive Detection of Cu2+ Using a Microcantilever Sensor Modified with L-Cysteine Self-Assembled Monolayer.

In situ detection of calcium ions with chemically modified microcantilevers

Highly Selective Microcantilever Sensor For Cesium Ion Detection

Highly Sensitive and Selective Fluoride Ion Sensors Based on Microcantilevers Modified with Hydrogels

Highly Sensitive and Selective Detection of Beryllium Ions Using a Microcantilever Modified with Benzo-9-crown-3 Doped Hydrogel.

Detection of Ph Variation Using Modified Microcantilever Sensors

Detection of Femtomolar Concentrations of HF Using an SiO(2) Microcantilever.

Al2O3-coated Microcantilevers for Detection of Moisture at Ppm Level

A Novel Self-Assembled Monolayer (SAM) Coated Microcantilever for Low Level Caesium Detection

A beryllium-selective microcantilever sensor modified with benzo-9-crown-3 functionalized polymer brushes

Nerve Agents Detection Using a Cu2+/l-Cysteine Bilayer-Coated Microcantilever

Detection of Pb 2+ Using a Hydrogel Swelling Microcantilever Sensor

Detection of Hg2+ Using Microcantilever Sensors

Detection of Organophosphates Using an Acetyl Cholinesterase (ache) Coated Microcantilever

Moisture measurement using porous aluminum oxide coated microcantilevers

Monolayer Two‐dimensional Molecular Crystals for an Ultrasensitive OFET‐based Chemical Sensor

Microcantilevers Modified by Horseradish Peroxidase Intercalated Nano-Assembly for Hydrogen Peroxide Detection