Abstract:Ultra-sensitive and selective moisture sensors are needed in various industries for processing control or environmental monitoring. As an outstanding sensor platform, surface-stress sensing microcantilevers have potential application in moisture detection. To enlarge the deflection of the microcantilever under surface stress induced by specific reactions, a new SiO 2 microcantilever is developed which features a much lower Young’s modulus than conventional Si or SiN x microcantilevers. For comparing SiO 2 cantilever with Si cantilevers, a model of the cantilever sensor is given by using both analysis and simulation, resulting in good agreement with the experimental data. The results demonstrate the SiO 2 cantilever can achieve a much higher sensitivity than the Si cantilever. In order to fabricate this device, a new fabrication process using isotropic combined with anisotropic dry etching to release the SiO 2 microcantilever beam by ICP (Inductively Coupled Plasma) was developed and investigated. This new process not only obtains a high etch rate at 9.1 μm/min, but also provides good profile controllability, and a flexibility of device design. Attributed to the high sensitivity, a significant deflection amplitude of the surface modified SiO 2 microcantilever was observed upon exposure to 1% relative humidity. The SiO 2 cantilevers are promising for inexpensive and highly sensitive moisture detection.

Detection of Femtomolar Concentrations of HF Using an SiO(2) Microcantilever.

Highly Sensitive and Selective Fluoride Ion Sensors Based on Microcantilevers Modified with Hydrogels

Detection of CrO4(2-) Using a Hydrogel Swelling Microcantilever Sensor.

Ultrasensitive Detection of Cro42- Using A Microcantilever Sensor

Detection of Ph Variation Using Modified Microcantilever Sensors

Ultrasensitive detection of CrO4(2-) using a microcantilever sensor.

Detection of Cro42- Using A Hydrogel Swelling Microcantilever Sensor

In situ detection of calcium ions with chemically modified microcantilevers

Fabrication and characterization of SiO2 microcantilever for microsensor application

Detection of Pb 2+ Using a Hydrogel Swelling Microcantilever Sensor

Nerve Agents Detection Using a Cu2+/l-Cysteine Bilayer-Coated Microcantilever

Detection of hydrofluoric acid by a SiO2 sol-gel coating fiber-optic probe based on reflection-based localized surface plasmon resonance

A Ph Sensor Based on a Microcantilever Coated with Intelligent Hydrogel

Microcantilevers Modified by Horseradish Peroxidase Intercalated Nano-Assembly for Hydrogen Peroxide Detection

Micromachined SiO 2 microcantilever for high sensitive moisture sensor

Fabrication and Characterization of Sio2 Microcantilever for High Sensitive Moisture Sensor

Fabrication of SiO $_{2}$ Microcantilever Using Isotropic Etching With ICP

Highly Sensitive and Selective Detection of Beryllium Ions Using a Microcantilever Modified with Benzo-9-crown-3 Doped Hydrogel.

Detection of Hg2+ Using Microcantilever Sensors

Experimental and theoretical aspects of glucose measurement using a microcantilever modified by enzyme-containing polyacrylamide.

Highly Selective Microcantilever Sensor For Cesium Ion Detection